2021
DOI: 10.1007/978-981-16-2919-8_19
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Design and Simulation of MEMS Based Capacitive Accelerometer

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Cited by 4 publications
(1 citation statement)
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“…When the sensor is subjected to acceleration, a force equal to the product of mass and acceleration causes the proof mass to displace in the direction normal to the sensor surface [ 1 ]. According to Newton’s second law of motion, acceleration ( a ) is the function of displacement ( x ) of the proof mass and is given by [ 22 ], where k and m are the spring constant and mass, respectively. The resistivity of nanocomposite at the sensor legs will change, which in turn changes the resistance.…”
Section: Sensing Mechanismmentioning
confidence: 99%
“…When the sensor is subjected to acceleration, a force equal to the product of mass and acceleration causes the proof mass to displace in the direction normal to the sensor surface [ 1 ]. According to Newton’s second law of motion, acceleration ( a ) is the function of displacement ( x ) of the proof mass and is given by [ 22 ], where k and m are the spring constant and mass, respectively. The resistivity of nanocomposite at the sensor legs will change, which in turn changes the resistance.…”
Section: Sensing Mechanismmentioning
confidence: 99%