Design and Simulation of MEMS Gas Sensor Topologies for Detection of Inert Gases

Umesh, Suma; Balachandra, T. C.; Usha, A.

doi:10.1016/j.matpr.2018.06.540

Cited by 5 publications

(3 citation statements)

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“…These processes allow designers to accumulate different sensor arrays on a single sensor platform that can be utilized for mass-production at a low cost [ 113 ]. Nanoscale MOS materials integrated with MEMS technology are widely employed in gas sensing applications due to the drastically reduced size, low cost and significantly lower power consumption of such devices [ [114] , [115] , [116] ]. In comparison with traditional MOS-based gas sensors ( Fig.…”

Section: Low-power Mems-based Gas Sensorsmentioning

confidence: 99%

“…In fact, the energy required to excite these electrons and holes is supplied by the light, instead of by heat. Furthermore, illumination facilitates the chemisorption of oxygen molecules on the surface to generate more O 2 - by improving the chemical activity of the surface [ 116 ] at RT as follows [ 150 , [160] , [161] , [162] ]: h ν → h + + e - O 2 + e− (hν) → O 2 - (h ν ) → O 2 – (h ν ) , where ν is the frequency of the illuminated light and h is Planck's constant.…”

Section: Low or Room-temperature Operated Mos Gas Sensorsmentioning

confidence: 99%

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Recent advances in energy-saving chemiresistive gas sensors: A review

et al. 2021

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With the tremendous advances in technology, gas-sensing devices are being popularly used in many distinct areas, including indoor environments, industries, aviation, and detectors for various toxic domestic gases and vapors. Even though the most popular type of gas sensor, namely, resistive-based gas sensors, have many advantages over other types of gas sensors, their high working temperatures lead to high energy consumption, thereby limiting their practical applications, especially in mobile and portable devices. As possible ways to deal with the high-power consumption of resistance-based sensors, different strategies such as self-heating, MEMS technology, and room-temperature operation using especial morphologies, have been introduced in recent years. In this review, we discuss different types of energy-saving chemisresitive gas sensors and their application in the fields of environmental monitoring. At the end, the review will be concluded by providing a summary, challenges and future perspectives.

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Section: Low-power Mems-based Gas Sensorsmentioning

confidence: 99%

Section: Low or Room-temperature Operated Mos Gas Sensorsmentioning

confidence: 99%

Recent advances in energy-saving chemiresistive gas sensors: A review

et al. 2021

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“…To achieve a high sensitivity and selectivity toward target gas molecules under highly humid conditions, that is, expiration, diverse types of gas detectors have been adopted including gas chromatography systems, , colorimetric sensors using dyes, − and semiconducting metal oxide (SMO)–based gas sensors. − Among them, SMO nanostructures have attracted much attention because of their facile and scalable production, as well as their small dimensions which enables the integration with portable electronic devices. − To enhance the performance and stability of SMOs for detecting trace levels of H 2 S, they are designed with high surface areas and porosities and are also commonly decorated with noble metal (Pt, Pd, Au, and Rh) nanoparticles (NPs). − Moreover, bimetallic NP catalysts have been suggested as a powerful candidate for greater levels of improvement and diversification of catalytic effects. ,, However, sophisticated control of such bimetallic catalysts is challenging in terms of controlling the size, uniformity, and cost for synthesis. It is therefore worthwhile to search for alternative options to maximize the sensing properties.…”

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confidence: 99%

Surface Activity-Tuned Metal Oxide Chemiresistor: Toward Direct and Quantitative Halitosis Diagnosis

et al. 2021

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Continuous monitoring of hydrogen sulfide (H2S) in human breath for early stage diagnosis of halitosis is of great significance for prevention of dental diseases. However, fabrication of a highly selective and sensitive H2S gas sensor material still remains a challenge, and direct analysis of real breath samples has not been properly attempted, to the best of our knowledge. To address the issue, herein, we introduce facile cofunctionalization of WO3 nanofibers with alkaline metal (Na) and noble metal (Pt) catalysts via the simple addition of sodium chloride (NaCl) and Pt nanoparticles (NPs), followed by electrospinning process. The Na-doping and Pt NPs decoration in WO3 grains induces the partial evolution of the Na2W4O13 phase, causing the buildup of Pt/Na2W4O13/WO3 multi-interface heterojunctions that selectively interacts with sulfur-containing species. As a result, we achieved the highest-ranked sensing performances, that is, response (R air/R gas) = 780 @ 1 ppm and selectivity (R H2S/R EtOH) = 277 against 1 ppm ethanol, among the chemiresistor-based H2S sensors, owing to the synergistic chemical and electronic sensitization effects of the Pt NP/Na compound cocatalysts. The as-prepared sensing layer was proven to be practically effective for direct, and quantitative halitosis analysis based on the correlation (accuracy = 86.3%) between the H2S concentration measured using the direct breath signals obtained by our test device (80 cases) and gas chromatography. This study offers possibilities for direct, highly reliable and rapid detection of H2S in real human breath without the need of any collection or filtering equipment.

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