Design and Simulation of MEMS Thermal Actuator

Ismail, Mohd Hafiz; Yeow, Wong Sean; Taib, Bibi Nadia; Johari, Shazlina; Ibrahim, Siti Noorjannah; Aris, Hasnizah

doi:10.1109/icocet63343.2024.10729936

2024 IEEE 1st International Conference on Communication Engineering and Emerging Technologies (ICoCET) 2024

DOI: 10.1109/icocet63343.2024.10729936

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Design and Simulation of MEMS Thermal Actuator

Mohd Hafiz Ismail,

Wong Sean Yeow,

Bibi Nadia Taib

et al.

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Design and Simulation of MEMS Thermal Actuator

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References 8 publications

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