2013 International Conference on Emerging Trends in Communication, Control, Signal Processing and Computing Applications (C2SPC 2013
DOI: 10.1109/c2spca.2013.6749409
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Design and simulation of silicon and polymer based piezoelectric MEMS microphone

Y. C. Muralidhar
1
,
B S Somesh
2
,
K N Neethu
3
et al.
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