Design and Simulation Studies on Linearised MEMS Capacitive Accelerometers with different Beam Springs

Abstract

Capacitive accelerometers based on change in air gap measurement often experiences non-linearity. In order to overcome this drawback, the overlapping area of the device is changed which produces linear output. In this paper, four different types of beam springs (viz. Half-folded spring, Meander spring, Serpentine spring and ZigZag spring) were introduced in the capacitive accelerometer structure. All the springs are subjected to different accelerations and linear outputs are obtained. The cross-axis performance of the four springs is compared. Among the four springs, Halffolded spring and Serpentine spring provide low cross-axis sensitivity. The structures are designed, analysed and simulated using IntelliSuite software.