CLIC is a proposed linear e + e − collider with center-of-mass energies of up to 3 TeV. Its main objectives are precise top quark and Higgs boson measurements, as well as searches for Beyond Standard Model physics. To meet the physics goals, the vertex and tracking detectors require not only a spatial resolution of a few micrometers and a very low material budget, but also timing capabilities with a precision of a few nanoseconds to allow suppression of beam-induced backgrounds.Different technologies using hybrid silicon detectors are explored for the vertex detectors, such as dedicated readout ASICs, small-pitch active edge sensors as well as capacitively coupled High-Voltage CMOS sensors. Monolithic sensors are considered as an option for the tracking detector, and a prototype using a CMOS process with a high-resistivity epitaxial layer is being designed. Different designs using a silicon-on-insulator process are under investigation for both vertex and tracking detector.All prototypes are evaluated in laboratory and beam tests, and newly developed simulation tools combining Geant4 and TCAD are used to assess and optimize their performance. This contribution gives an overview of the R&D program for the CLIC vertex and tracking detectors, highlighting new results from the prototypes.