Design and testing of piezoelectric resonant pressure sensor

Sujan, Y.; Uma, G.; Umapathy, M.

doi:10.1016/j.sna.2016.09.031

Cited by 23 publications

(7 citation statements)

References 11 publications

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“…The main principle of surface acoustic wave micro-pressure sensor is to use the SAW technology theory and the performance of piezoelectric materials to experiment with passive wireless transmission functions. The SAW micro-pressure sensor is mainly composed of two interdigital transducers, a piezoelectric substrate, a metal base, and wires [14]. The working mechanism is: when the surface piezoelectric material of the SAW micro-pressure sensor is subject to an external force, the stress at each point of the material changes.…”

Section: Related Workmentioning

confidence: 99%

Fitting analysis and research of measured data of SAW micro-pressure sensor based on BP neural network

Huang

et al. 2020

Measurement

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Section: Related Workmentioning

confidence: 99%

Fitting analysis and research of measured data of SAW micro-pressure sensor based on BP neural network

Huang

et al. 2020

Measurement

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“…From the fitting curve, the theoretical value of the measurement point can be obtained and the maximum linear deviation can be calculated. So the uncertainty component of non-linearity is calculated as 0:0381 Hz according to equation (1).…”

Section: Calculation Of the Uncertainty Componentmentioning

confidence: 99%

“…With the continuous development and application of sensor technology, surface acoustic wave (SAW) micro-pressure sensors are widely used to measure important physical quantities, such as surface force, hydraulic pressure and object acceleration, which has strong anti-interference ability and high accuracy and resolution when performing pressure measurement. 1,2 However, measurement uncertainty analysis of the sensor is not only a criterion for evaluating the quality of the measurement results, but also an important index that directly affects the above-mentioned various applications. 3 Measurement uncertainty is widely accepted as a quantitative indicator of the quality of measurement results, which the results including are complete, reliable and of practical value.…”

Section: Introductionmentioning

confidence: 99%

Analysis of measurement uncertainty of a surface acoustic wave micro-pressure sensor

Huang

Jiang

et al. 2019

Measurement and Control

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As an important support for test and control projects, sensor's performance is directly related to the accuracy of the measurement. To fully analyze the sources of measurement uncertainty for a surface acoustic wave micro-pressure sensor, in this study the Monte Carlo method and Guide to the Expression of Uncertainty in Measurement to evaluate measurement uncertainty of sensors are used, the sensing experiment was conducted and the measurement addition model was established. We determined the source of measurement uncertainty for a surface acoustic wave micro-pressure sensor. The results show that the Monte Carlo method can obtain a more reliable and accurate inclusion interval in the measurement uncertainty evaluation of a surface acoustic wave micro-pressure sensor.

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“…With the applied pressure, its frequency changes and the pressure is measured according to the change in frequency. Various piezoelectric-based resonant sensor designs in meso- and micro-scale are available in the literature (Li and Kan, 2010; Han and Kim, 2013; Sujan et al , 2016; Sujan et al , 2017; Sankalp and Sujan, 2020). Other pressure sensors are also available in the literature, like acoustics-based pressure sensors using surface acoustic wave (SAW) filters (Ren et al , 2016; Xie et al , 2018; Muller et al , 2017).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and testing of a Hall effect based pressure sensor

Paliwal

Yenuganti

Manuvinakurake

2022

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Purpose This paper aims to present the fabrication and testing of a pressure sensor integrated with Hall effect sensors and permanent magnets arranged in two configurations to measure pressure in the range of 0–1 bar. The sensor is fabricated using stainless steel (SS) and can be used in high-temperature and highly corrosive environments. The fabricated sensor is of low cost, self-packaged and the differential arrangement helps in compensating for any ambient temperature variations. Design/methodology/approach The sensor deflects of a circular diaphragm with a simple rigid mechanical structure to convert the applied pressure to a Hall voltage output. Two sensor designs are proposed with a single pair of Hall sensors and magnets and a differential configuration with two Hall sensors and magnets. Two sensor designs are designed, fabricated and tested for their input–output characteristics and the results are compared. Findings The fabricated sensors are calibrated for 25 cycles of ascending and descending pressure in steps of 0.1 bar. Various static characteristics like nonlinearity, hysteresis and % error are estimated for both the sensor designs and compared with the existing Hall effect based pressure sensors. The differential arrangement design was found to have better characteristics as compared to the other design from the experimental data. Originality/value This paper focuses on fabricating and testing a novel differential Hall effect based pressure sensor. The differential arrangement of the sensor aids in the compensation of ambient temperature variations and the use of SS enables the sensor in high-temperature and highly corrosive applications. The proposed sensor is low cost, simple and self-packaged, and found to have high repeatability and good linearity compared to other similar Hall effect based pressure sensors available in the literature.

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Design and testing of piezoelectric resonant pressure sensor

Cited by 23 publications

References 11 publications

Fitting analysis and research of measured data of SAW micro-pressure sensor based on BP neural network

Fitting analysis and research of measured data of SAW micro-pressure sensor based on BP neural network

Analysis of measurement uncertainty of a surface acoustic wave micro-pressure sensor

Fabrication and testing of a Hall effect based pressure sensor

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