“…Figure 1 a represents various MEMS sensors and the associated harsh environment conditions. These conditions are typically found in combustion optimization and emission control, oil industries, chemical process control, the propulsion systems of spacecraft and deep-sea devices [ 2 , 3 ]. In recent years, a number of flow sensors have been fabricated and characterized for the measurement of pressure [ 4 , 5 , 6 ], temperature [ 7 , 8 ], gas species [ 9 , 10 , 11 , 12 , 13 ], strain [ 14 , 15 , 16 , 17 ] and acceleration [ 18 , 19 ] in these environments.…”