2021
DOI: 10.1016/j.sna.2021.112798
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Design approach to stabilizing controller in state space for non-driven micromechanical gyro

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“…In ideal operational modes of MEMS gyroscope, modes are considered mechanically decoupled and natural frequencies must be paired. Other parameters such as coefficient of damping, the mass of the MEMS gyroscope, and natural frequencies are constant while the gyroscope's response is dependent on the angular velocity [4]. Nevertheless, sensitivity of the gyroscope is degraded due to the different factors like imperfections in the fabrication process, environmental changes which result in a change of parameters, the mechanical coupling of both axes, and several types of noises alongside axes.…”
Section: Introductionmentioning
confidence: 99%
“…In ideal operational modes of MEMS gyroscope, modes are considered mechanically decoupled and natural frequencies must be paired. Other parameters such as coefficient of damping, the mass of the MEMS gyroscope, and natural frequencies are constant while the gyroscope's response is dependent on the angular velocity [4]. Nevertheless, sensitivity of the gyroscope is degraded due to the different factors like imperfections in the fabrication process, environmental changes which result in a change of parameters, the mechanical coupling of both axes, and several types of noises alongside axes.…”
Section: Introductionmentioning
confidence: 99%