Design, Assessment, and Trajectory Control of a Novel Decoupled Robotic Nanomanipulator

Yang, Xu; Zhu, Wu-Le; Zhu, Zhiwei; Zhu, Limin

doi:10.1109/tmech.2022.3147767

Cited by 12 publications

(4 citation statements)

References 38 publications

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“…(10) (7) For the PDCNS, the maximum stress usually occurs in beam 1 or beam 2. Hence, a maximum stress matrix is established for the PDCNS as follows:…”

Section: Analytical Modellingmentioning

confidence: 99%

“…Precision-positioning platforms with nanometer resolution play more and more important roles in many scientific and industrial applications [1][2][3][4][5][6]. In previous research, piezoelectric actuators were often adopted to configure these nanopositioning stages because of their fast speed and nanometer-level resolution [7][8][9][10]. Nevertheless, the maximum stroke of the piezoelectric actuator is only about 0.1% of its length [11].…”

Section: Introductionmentioning

confidence: 99%

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Development of a Parallel Dual-Stage Compliant Nanopositioning System

Yang

Shang

et al. 2022

Actuators

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This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a specially devised A-shaped compliant mechanism, which leads to many excellent performances, such as good resolution and large stroke and broadband. To enhance the closed-loop-positioning capability of the proposed PDCNS, a double-servo cooperative control (DSCC) strategy is specially constructed. The performance of the proposed PDCNS is evaluated by analytical model, finite element analysis, and experimental research. Results show that the first-order resonance frequency of the designed A-shaped compliant mechanism can reach 99.7 Hz. Combined with the designed DSCC, the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of ≤50 nm.

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“…(10) (7) For the PDCNS, the maximum stress usually occurs in beam 1 or beam 2. Hence, a maximum stress matrix is established for the PDCNS as follows:…”

Section: Analytical Modellingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Development of a Parallel Dual-Stage Compliant Nanopositioning System

Yang

Shang

et al. 2022

Actuators

Self Cite

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“…The piezoelectric actuator (PEA) is a normally-used driving component in compliant mechanisms owing to its high resolution, rapid response and ease of compact size [ 8 , 9 , 10 ]. With all outstanding superiorities as mentioned, the piezo-driven compliant mechanism has been one of the promising choices for precision manipulators [ 11 , 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Xie

Cheung

2022

Micromachines

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Compliant mechanisms are popular to the applications of micro/nanoscale manipulations. This paper proposes a novel triaxial parallel-kinematic compliant manipulator inspired by the Tripteron mechanism. Compared to most conventional triaxial compliant mechanisms, the proposed manipulator has the merits of structure compactness and being free of assembly error due to its unique configuration and the utilize of 3D printing technology. The compliance matrix modeling method is employed to determine the input stiffness of the compliant manipulator, and it is verified by finite-element analysis (FEA). Results show that the deviations between simulation works and the derived analytical models are in an acceptable range. The simulation results also reveal that the compliant manipulator can achieve a 16 μm × 16 μm × 16 μm cubic workspace. In this motion range, the observed maximum stress is much lower than the yield strength of the material. Moreover, the dynamic characteristics of the manipulator are investigated via the simulations as well.

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“…The essential operation of the microgripper relies on the mechanism of the specific type of actuators employed, such as a thermopiezoelectric actuator. Micro-grippers have been developed using two parallel lead zirconate titanate (PZT) layers with a fixed range of displacement [13,14]. Other micromanipulation mechanisms have been designed to enable the tip of the micro-gripper to move in parallel.…”

Section: Introductionmentioning

confidence: 99%

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

et al. 2022

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The current study presents an adaptive control approach to solve the tracking trajectory problem for a robotic manipulator that uses a gripper based on bimorph piezoelectric actuators. The development of an adaptive gain state feedback form that considers the state restrictions is proposed using a novel class of barrier Lyapunov function that drives the effective control of joints and piezoelectric actuators. The proposed method allows for the inclusion of complex combinations of state restrictions in the Lyapunov function, yielding the construction of differential forms for the gains in the controller that can handle the evolution of trajectories of the robotic arm inside the restricted region. The proposed control design successfully tracks reference trajectories for both joints of the robotic arm as well as the motion of the piezoelectric device during several operative scenarios. A comprehensive experimental study evaluates the effect of introducing state-dependent gain considering state restrictions of the ellipsoidal type. The comparison of the mean square error confirms the contributions of the developed control action, showing better tracking quality for less control power with the same evaluation, which is a desirable characteristic in the controlled motion of micromanipulators. The proposed controller solves the tracking trajectory problem for the micromanipulation system, satisfies the motion restrictions, and allows better tracking performance to be enforced. Furthermore, comparison of the obtained trajectories seems to validate the proposed controller’s contribution concerning a feedback form with fixed gains.

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Design, Assessment, and Trajectory Control of a Novel Decoupled Robotic Nanomanipulator

Cited by 12 publications

References 38 publications

Development of a Parallel Dual-Stage Compliant Nanopositioning System

Development of a Parallel Dual-Stage Compliant Nanopositioning System

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

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