Design calculations and characterization of C/Cr multilayer mirrors in the 6 nm BEUV

Alnaimi, Radhwan; Wang, Haixia; Zhang, Zhong; Yang, Xiaowei; Wen, Mingwu

doi:10.1016/j.ijleo.2015.10.118

Cited by 5 publications

(1 citation statement)

References 4 publications

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“…during the deposition were shown to improve the interfaces, thermal stability and stress in Cr-based multilayers. Accurate structural characterizations were carried out to gain further knowledge about the interface characteristics in Cr/C or Cr/B 4 C multilayers by grazing-incidence X-ray reflectometry (Alnaimi et al, 2016;Burcklen et al, 2016), transmission electron microscopy (TEM) (Jiang et al, 2011;Burcklen et al, 2016) and Raman spectrometry (Tu et al, 2014), etc. Cr/Sc multilayers were also investigated by TEM and X-ray scattering to study their thermal stability (Majkova et al, 2006).…”

Section: Introductionmentioning

confidence: 99%

Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers

Jiang

Wang

Zhu

et al. 2018

J Synchrotron Radiat

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The interior structure, morphology and ligand surrounding of a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers are determined by various hard X-ray techniques in order to reveal the growth characteristics of Cr-based thin films. A Cr monolayer presents a three-stage growth mode with sudden changes occurring at a layer thickness of ∼2 nm and beyond 6 nm. Cr-based multilayers are proven to have denser structures due to interfacial diffusion and layer growth mode. Cr/C and Cr/Sc multilayers have different interfacial widths resulting from asymmetry, degree of crystallinity and thermal stability. Cr/Sc multilayers present similar ligand surroundings to Cr foil, whereas Cr/C multilayers are similar to Cr monolayers. The aim of this study is to help understand the structural evolution regulation versus layer thickness and to improve the deposition technology of Cr-based thin films, in particular for obtaining stable Cr-based multilayers with ultra-short periods.

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Section: Introductionmentioning

confidence: 99%

Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers

Jiang

Wang

Zhu

et al. 2018

J Synchrotron Radiat

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Influence of substrate on structural, morphological and optical properties of TiO2 thin films deposited by reaction magnetron sputtering

Zhu

et al. 2017

AIP Advances

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Titanium dioxide (TiO2) films have been prepared by DC reaction magnetron sputtering technique on different substrates (glass, SiO2, platinum electrode-Pt, Silicon-Si). X-ray diffraction (XRD) patterns showed that all TiO2 films were grown along the preferred orientation of (110) plane. Samples on Si and Pt substrates are almost monophasic rutile, however, samples on glass and SiO2 substrates accompanied by a weak anatase structure. Atomic force microscopy (AFM) images revealed uniform grain distribution except for films on Pt substrates. Photoluminescence (PL) spectra showed obvious intrinsic emission band, but films on glass was accompanied by a distinct defect luminescence region. Raman spectroscopy suggested that all samples moved to high wavenumbers and films on glass moved obviously.

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Luminescence study on crystalline phase of Y2Si2O7 from mesoporous silica and Y2O3: Ln3+ at 900 °C

et al. 2018

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Mesoporous silica nanoparticles (mSiO2) have been used in many applications including drug delivery, catalysis, sensing. In drug delivery, tracing of mSiO2 needs incorporation of organic dyes or radio nuclei, etc. However, organic dyes are unstable under various mediums or in longer duration. To overcome this, one of ways is use of lanthanide ions (Ln3+) such as Eu3+, Tb3+ or Dy3+, which show luminescence in visible as well as near infrared (NIR) regions. In this work, nanocomposites of mSiO2 and Y2O3:Ln3+ have been prepared. These are characterized by several techniques. mSiO2 is stable up to 500 °C and microstructure of mesoporous collapses at 900 °C. Interestingly, mSiO2 reacts with Y2O3 to form Y2Si2O7 phase at 900 °C. On the other hand, such phase was not formed from Y2O3 and amorphous SiO2 at same temperature. This finding of the formation of highly crystalline Y2Si2O7 at lower temperature 900 °C is the first report to the best of authors’ knowledge. Their luminescence studies are performed by single or multi doping of Ln3+ ions. Their energy transfer processes are discussed. The crystallinity of Y2O3 or Y2Si2O7 is improved after co-doping of Ce3+ to Ln3+. Such nanocomposites are highly dispersible in distilled water, methanol and PBS (Phosphate Buffered Saline).

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Design calculations and characterization of C/Cr multilayer mirrors in the 6 nm BEUV

Cited by 5 publications

References 4 publications

Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers

Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers

Influence of substrate on structural, morphological and optical properties of TiO2 thin films deposited by reaction magnetron sputtering

Luminescence study on crystalline phase of Y2Si2O7 from mesoporous silica and Y2O3: Ln3+ at 900 °C

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