Design, closed-form modeling and analysis of SU-8 based electrothermal microgripper for biomedical applications

Masood, Muhammad Umar; Saleem, Muhammad Mubasher; Khan, Umar Shahbaz; Hamza, Amir

doi:10.1007/s00542-018-4059-z

Cited by 15 publications

(3 citation statements)

References 46 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…As a last remark, it should be noticed that alternative systems can also be found in the literature even if they have not been classified as SMs. Among them electrothermal and electrostatic actuators for biomedical applications can be included [144][145][146][147].…”

Section: Ref Applicationmentioning

confidence: 99%

Performance of Smart Materials-Based Instrumentation for Force Measurements in Biomedical Applications: A Methodological Review

et al. 2023

View full text Add to dashboard Cite

The introduction of smart materials will become increasingly relevant as biomedical technologies progress. Smart materials sense and respond to external stimuli (e.g., chemical, electrical, mechanical, or magnetic signals) or environmental circumstances (e.g., temperature, illuminance, acidity, or humidity), and provide versatile platforms for studying various biological processes because of the numerous analogies between smart materials and biological systems. Several applications based on this class of materials are being developed using different sensing principles and fabrication technologies. In the biomedical field, force sensors are used to characterize tissues and cells, as feedback to develop smart surgical instruments in order to carry out minimally invasive surgery. In this regard, the present work provides an overview of the recent scientific literature regarding the developments in force measurement methods for biomedical applications involving smart materials. In particular, performance evaluation of the main methods proposed in the literature is reviewed on the basis of their results and applications, focusing on their metrological characteristics, such as measuring range, linearity, and measurement accuracy. Classification of smart materials-based force measurement methods is proposed according to their potential applications, highlighting advantages and disadvantages.

show abstract

Section: Ref Applicationmentioning

confidence: 99%

Performance of Smart Materials-Based Instrumentation for Force Measurements in Biomedical Applications: A Methodological Review

et al. 2023

View full text Add to dashboard Cite

show abstract

“…jaw, actuator, and sensor. Actuators utilize either electrostatic [35][36][37][38], piezoelectric [39,40], thermal [41][42][43], or magnetic [44] action for driving the microgripper, whereas sensors use electrostatic [45][46][47][48] or piezoresistive [49,50] mechanisms mostly. For pick and place or grasping applications of micro-sized objects, microgrippers need some type of feedback mechanism for determining a firm grip.…”

Section: Introductionmentioning

confidence: 99%

Analytical design and finite element analysis of a microgripper for characterizing a single microcapsule

Tariq

Ahmed²,

Bazaz³

2022

Meas. Sci. Technol.

View full text Add to dashboard Cite

The typical technique of hardness test of pharmaceutical microcapsules is by using pressure transducer-based bulky devices by averaging mechanism. This not only produces non-precise results but also causes wastage of costly core material present in the microcapsules. To overcome these issues a miniaturized version of the device using a Micro Electromechanical System (MEMS) based microgripper has been proposed, which can mechanically characterize a single microcapsule of sizes ranging from 5µm to 20µm with a maximum rupture force of 13.33mN. The proposed microgripper consists of a hybrid chevron thermal actuator and integrated capacitive force sensor and has been designed using the standard SOIMUMPs process with a device size of 2.5×3.2mm2. The microgripper is efficiently modeled to produce a temperature gradient of about 350oC from the actuator to the jaws making it able to handle temperature-sensitive samples.

show abstract

“…Mikro-aktüatörler, genellikle büyük yer değiştirme aralığı, yüksek çalışma frekansları, minyatürleştirme, paketleme ve entegrasyon tesislerini gerektiren çok çeşitli uygulamalar tarafından kullanılır [17][18][19]. Bu uygulamaları gerçekleştirmek için mikroaktüatörler, piezoelektrik, elektrostatik, elektrotermal veya manyetik gibi çalıştırma mekanizmaları gerektirmektedir [20,21]. Bu mekanizmalar arasında elektrotermal çalıştırma, yüksek mukavemet, yüksek kuvvet çıkışı ve düşük frekanslı çalışma gibi özelliklerinden dolayı daha çok tercih edilmektedir [22].…”

Section: Gi̇ri̇ş (Introduction)unclassified

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Ülkir¹

2021

Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi

View full text Add to dashboard Cite

 Fabrication of microactuator  Fabrication with digital light processing  Characterization of the electrothermal microactuator In this study, the characterization of the electrothermal micro-actuator fabricated using digital light processing, which is one of the 3D fabrication methods, was realized using the image processing algorithm. For this aim, three different experiments were conducted during the fabrication process. During the fabrication process of the first two experiments, deterioration or breakage occurred in the micro-actuator structure. These problems did not occur in the fabrication of the 3rd experiment. Characterization process was done with the microactuator fabricated as a result of experiment 3. Based on the experimental results, the fabrication and displacement of the micro-actuator is carried out successfully. Figure A. Fabrication of electrothermal micro-actuator a) fabrication as a result of experiment 1 b) fabrication as a result of experiment 2, fabrication as a result of experiment 3 Purpose: This work aims to fabricate electrothermal micro-actuator with digital light processing method and characterize it with image processing algorithm. Theory and Methods: This work consists of three main phases, namely, design, fabrication and characterization. Results: It has been observed that the support structures used on the micro-actuator have a great influence on the 3D fabrication process. In the characterization process, when a voltage higher than 6V is applied to the micro actuator, it was observed that breakages or deteriorations occurred in its structure. Conclusion: It is concluded that the support structures are very important in the fabrication process of the micro-actuator using 3D fabrication technique. On the other hand, in the characterization process, it has been determined that the displacement of the micro-actuator is directly proportional to the applied voltage, but its structure is distorted after a point. As a result of experimental studies, the maximum displacement was measured as 3.84 µm at 6V voltage. As the actuator design is bidirectional, the maximum displacement of the micro-actuator was determined to be 7.68 µm.

show abstract

Design, closed-form modeling and analysis of SU-8 based electrothermal microgripper for biomedical applications

Cited by 15 publications

References 46 publications

Performance of Smart Materials-Based Instrumentation for Force Measurements in Biomedical Applications: A Methodological Review

Performance of Smart Materials-Based Instrumentation for Force Measurements in Biomedical Applications: A Methodological Review

Analytical design and finite element analysis of a microgripper for characterizing a single microcapsule

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Contact Info

Product

Resources

About