Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses

Wonisch, Andreas; Neuhäusler, U.; Кабачник, Н. М.; Uphues, Thorsten; Uiberacker, M.; Yakovlev, Vladislav S.; Krausz, Ferenc; Drescher, Markus; Kleineberg, Ulf; Heinzmann, Ulrich

doi:10.1364/ao.45.004147

Cited by 65 publications

(22 citation statements)

References 28 publications

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“…Similar approaches have been tried for optimization of chirped mirrors in the past [12,13]; however, none of them allowed to obtain GDD and reflectivity levels comparable with our results.…”

Section: Introductionsupporting

confidence: 56%

Optimization of broadband semiconductor chirped mirrors with genetic algorithm

et al. 2016

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and high damage threshold. However, the high refractive index contrast results in low number of distributed Bragg reflector (DBR) pairs and, consequently, constant value of high negative GDD can be hard to achieve over a broad band (around 10 nm near the 1-µm wavelength) with such mirrors. On the other hand, semiconductor chirped mirrors have lower refractive index contrast and, thus, require more DBR pairs, which allows to provide better separation of reflection of different wavelengths and makes it easier to tune constant negative GDD over a broader band. In our previous works [4][5][6] we have demonstrated tunable semiconductor double-chirped mirrors with negative dispersion for applications in femtosecond lasers operating near 1 µm. We have fabricated them using arsenide-based molecular beam epitaxy (MBE), and with intentionally introduced layer thickness spatial gradient, we were able to make the mirror properties (reflectivity and dispersion) tunable over an 80-nm range across the mirror surface. We demonstrated tunable mode-locked femtosecond operation of an Yb:KY(WO 4 ) 2 diode-pumped laser oscillator at the 1035-nm wavelength.We obtained negative group-delay dispersion (GDD), necessary for the femtosecond laser operation in the soliton regime, by using a double chirp of the mirror stack that resulted in different wavelengths being reflected at different depths within the semiconductor stack. In our mirror design, we followed classical approach, using an analytical formula [7]. However, to apply this formula we had to make a number of approximations [8], which resulted in a non-optimal mirror design. Hence, we have decided to focus our research on using exact numerical solutions of Maxwell equations and to perform computer optimization in order to achieve a structure with lower mean GDD spanning over a wider bandwidth with reduced oscillations. AbstractGenetic algorithm was applied for optimization of dispersion properties in semiconductor Bragg reflectors for applications in femtosecond lasers. Broadband, large negative group-delay dispersion was achieved in the optimized design: The group-delay dispersion (GDD) as large as −3500 fs 2 was theoretically obtained over a 10-nm bandwidth. The designed structure was manufactured and tested, providing GDD −3320 fs 2 over a 7-nm bandwidth. The mirror performance was verified in semiconductor structures grown with molecular beam epitaxy. The mirror was tested in a passively mode-locked Yb:KYW laser.

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Section: Introductionsupporting

confidence: 56%

Optimization of broadband semiconductor chirped mirrors with genetic algorithm

et al. 2016

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“…26 The multilayer surface structure of the inner mirror is designed to reflect XUV radiation with a given bandwidth and central photon energy, which defines the pulse duration of the isolated attosecond pulse. 37,38 In conjunction with the metal foil in the two-component filter, it reflects a part of the cut-off region of the spectrum with a flat phase, to avoid temporal dispersion, which would broaden the attosecond XUV pulse. 38 The outer mirror is typically coated with 13 nm of boron carbide acting as a partial reflector for the NIR pulses with a reflectivity of ∼20%.…”

Section: Beamlinementioning

confidence: 99%

A flexible apparatus for attosecond photoelectron spectroscopy of solids and surfaces

Magerl

Neppl

Cavalieri

et al. 2011

Review of Scientific Instruments

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We describe an apparatus for attosecond photoelectron spectroscopy of solids and surfaces, which combines the generation of isolated attosecond extreme-ultraviolet (XUV) laser pulses by high harmonic generation in gases with time-resolved photoelectron detection and surface science techniques in an ultrahigh vacuum environment. This versatile setup provides isolated attosecond pulses with photon energies of up to 140 eV and few-cycle near infrared pulses for studying ultrafast electron dynamics in a large variety of surfaces and interfaces. The samples can be prepared and characterized on an atomic scale in a dedicated flexible surface science end station. The extensive possibilities offered by this apparatus are demonstrated by applying attosecond XUV pulses with a central photon energy of ∼125 eV in an attosecond streaking experiment of a xenon multilayer grown on a Re(0001) substrate

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“…Besides the broad bandwidth with a specific reflectance profile as mentioned above, a linear or non-linear phase response can be achieved. 56,57 The latter one is based on the different penetration depth inside the multilayer for different frequency components of the incoming light, so that a negative or positive chirp can be achieved to compensate the intrinsic chirp among the harmonics and further compress the pulse. 55,58 Based on this idea, aperiodic chirped multilayers were first designed with 52 the desired phase characteristics and for these designs an attosecond-level pulse duration was predicted.…”

Section: Broadband Multilayer For High Temporal Resolutionmentioning

confidence: 99%

“…55,58 Based on this idea, aperiodic chirped multilayers were first designed with 52 the desired phase characteristics and for these designs an attosecond-level pulse duration was predicted. 57,59 With the advancement of the deposition techniques and various methods of phase measurements, significant progress has been achieved in chirped multilayer mirrors over the past few years. 60 Short pulses with 170-130 as duration have been demonstrated in the region of 75-105 eV using Mo/Si multilayers with a reflectivity of 5%-10%.…”

Section: Broadband Multilayer For High Temporal Resolutionmentioning

confidence: 99%

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Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses

Cited by 65 publications

References 28 publications

Optimization of broadband semiconductor chirped mirrors with genetic algorithm

Optimization of broadband semiconductor chirped mirrors with genetic algorithm

A flexible apparatus for attosecond photoelectron spectroscopy of solids and surfaces

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

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