Mixed-anion, GaAs 1-y Sb y metamorphic materials with a wide range of antimony (Sb) compositions extending from 15% to 62%, were grown by solid source molecular beam epitaxy (MBE) on GaAs substrates. The impact of different growth parameters on the Sb composition in GaAs 1-y Sb y materials was systemically investigated. The Sb composition was well-controlled by carefully optimizing the As/Ga ratio, the Sb/Ga ratio, and the substrate temperature during the MBE growth process. High-resolution x-ray diffraction demonstrated a quasi-complete strain relaxation within each composition of GaAs 1-y Sb y . Atomic force microscopy exhibited smooth surface morphologies across the wide range of Sb compositions in the GaAs 1-y Sb y structures. Selected high-j dielectric materials, Al 2 O 3 , HfO 2 , and Ta 2 O 5 were deposited using atomic layer deposition on the GaAs 0.38 Sb 0.62 material, and their respective band alignment properties were investigated by x-ray photoelectron spectroscopy (XPS). Detailed XPS analysis revealed a valence band offset of >2 eV for all three dielectric materials on GaAs 0.38 Sb 0.62 , indicating the potential of utilizing these dielectrics on GaAs 0.38 Sb 0.62 for p-type metal-oxide-semiconductor (MOS) applications. Moreover, both Al 2 O 3 and HfO 2 showed a conduction band offset of >2 eV on GaAs 0.38 Sb 0.62 , suggesting these two dielectrics can also be used for n-type MOS applications. The well-controlled Sb composition in several GaAs 1-y Sb y material systems and the detailed band alignment analysis of multiple high-j dielectric materials on a fixed Sb composition, GaAs 0.38 Sb 0.62 , provides a pathway to utilize GaAs 1-y Sb y materials in future microelectronic and optoelectronic applications.