Design, Fabrication and Analysis of Threshold-Value Judging Mechanism in MEMS Safety and Arming Device

Abstract

Abstract:In order to meet the military requirements of the fuze, such as precision strike, efficient 14 mutilates ability and low collateral damages, the microminiaturization is an inevitable trend of 15 secure system. Based on the silicon-based MEMS S&A device designed by our term, the design