Design, fabrication, and application of GHz SAW devices

Knauer, U.; Machui, J.; Ruppel, C.C.W.

doi:10.1109/mwsym.1997.596915

Cited by 19 publications

(5 citation statements)

References 6 publications

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“…These SAW sensors are fabricated in a clean room having less than 100 particles per cubic meter. Subsequent etching, dicing, bonding and packing have to be done before testing of a SAW sensor using a vector network analyser (Knauer et al, 1997…”

Section: Saw Sensor Fabrication Processmentioning

confidence: 99%

Archives of Acoustics

Panneerselvam¹,

Thirumal²,

Pandya³

2018

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Detection and identification of toxic environmental gases have assumed paramount importance precisely in the defense, industrial and civilian security sector. Numerous methods have been developed for the sensing of toxic gases in the environment ever since surface acoustic wave (SAW) technology came into existence. Such SAW sensors called electronic nose (E-Nose) sensor use the frequency response of a delay line/resonator. SAW device is focused and given importance. The selective coating between input and output interdigital transducers (IDTs) in the SAW device is responsible for corresponding changes in operating frequency of the device for a specific gas/vapour absorbed from the environment. A suitable combination of well-designed SAW delay lines with selective coatings not only help to improve sensor sensitivity and selectivity but also leads to the minimization of false frequency alarms in the E-Nose sensor. This article presents a comprehensive review of design, development, simulation and modelling of a SAW sensor for potential sensing of toxic environmental gases.

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Section: Saw Sensor Fabrication Processmentioning

confidence: 99%

Archives of Acoustics

Panneerselvam¹,

Thirumal²,

Pandya³

2018

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“…The entire mask was printed onto a chrome glass surface. Currently, there are variety of techniques to fabricate the sub-micron electrodes is quite challenging using optical lithography, for instance Ultra-Violet (UV) and deep UV lithography, but by useful techniques such as off axis illumination, SAW resonators have been fabricated at 2.45 GHz [8] and 3.15 GHz [9].…”

Section: Fabrication Processmentioning

confidence: 99%

Design Development of Acoustic Waves Based Sensitive Sensors for <i>Escherichia coli</i> O157:H7 Detection

Ten

Hashim

Sudin

et al. 2014

AMR

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Food contamination has become critical issue and is being worse due to the insensitive detection devices. One of the dangerous food contaminations is by Escherichia coli (E.coli) O157:H7, one of the harmful bacterial pathogens which is distributed in soil, marine and estuarine waters, the intestinal tract of animals, or water contaminated with fecal matter. A small amount of E.coli with the dose fewer than 100 organisms in food products or water is enough to cause serious gastrointestinal illness to human. Hence, the ultra-high sensitive, label free biosensors have been designed in this research for the low concentration E.coli detection. Surface acoustic waves (SAW) devices have been initially developed and used for the high-volume low-cost TV component. Due to the ultra-sensitivity to the surface perturbation, SAW based devices have been modified to be sensors. Initially, SAW sensors were developed for gas detections and have been moving towards biological detections recently. Shear horizontal surface acoustic wave (SHSAW), one of the SAW based types is most suitable for the liquid based application as it has the advantage of acoustic energy is not being radiated into liquid. However, the main SHSAW design components are the operating frequency and wave length. These are strictly depended on the inter digital transducers (IDTs) design. Therefore, this paper is presenting the IDTs design concept and pattern development by using computer aid design (CAD) software.

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“…Usually, the SAW companies apply optical exposure by which submicron patterning is already achievable. E.g., the Siemens process based on optical projection printing in conjunction with lift-off allows routinely for highly stable line width of less than 0.3 gm (18). Wafer discs with diameters of up to 4 inches are processed on a production scale.…”

Section: Saw Design and Technologymentioning

confidence: 99%

Saw-Based Radio Sensor and Communication Techniques

Seifert

Weigel²

1997

27th European Microwave Conference, 1997

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Surface acoustic waves can be generated at the free surface of an elastic solid. This phenomenon has been exploited for electronic analog signal processing over the past 30 years, with the development of a host of devices and systems for consumer, commercial and military applications running at a some hundred million dollar annual rate. The objective of this paper is to provide an overview of the latest developments in the surface acoustic wave (SAW) field and to identify upcoming applications in remote sensing and communications. It. is intended to address some of the key issues in the successful design and manufacture of SAW devices and to discuss the operating principles from a microwave design viewpoint.

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Design, fabrication, and application of GHz SAW devices

Cited by 19 publications

References 6 publications

Archives of Acoustics

Archives of Acoustics

Design Development of Acoustic Waves Based Sensitive Sensors for <i>Escherichia coli</i> O157:H7 Detection

Saw-Based Radio Sensor and Communication Techniques

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