Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Ghalichechian, Nima; Modafe, A.; Beyaz, Mustafa İlker; Ghodssi, Reza

doi:10.1109/jmems.2008.916346

Cited by 79 publications

(65 citation statements)

References 28 publications

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“…To our best knowledge, this is a record in both duration time and number of cycles among all reported rotary motors made from synthesized nanoparticles. This performance has surpassed the recent top-down-made Si micromotors 11 , showing the realistic potential of our nanomotors. After 15 h rotation, the Au cap layer on magnetic bearing was significantly thinned by frictional wearing.…”

Section: Durability Of Nanomotors How Durable Are These Nanomotors?mentioning

confidence: 85%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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The development of rotary nanomotors is crucial for advancing nanoelectromechanical system technology. In this work, we report design, assembly and rotation of ordered arrays of nanomotors. The nanomotors are bottom-up assembled from nanoscale building blocks with nanowires as rotors, patterned nanomagnets as bearings and quadrupole microelectrodes as stators. Arrays of nanomotors rotate with controlled angle, speed (over 18,000 r.p.m.), and chirality by electric fields. Using analytical modelling, we reveal the fundamental nanoscale electrical, mechanical and magnetic interactions in the nanomotor system, which excellently agrees with experimental results and provides critical understanding for designing metallic nanoelectromechanical systems. The nanomotors can be continuously rotated for 15 h over 240,000 cycles. They are applied for controlled biochemical release and demonstrate releasing rate of biochemicals on nanoparticles that can be precisely tuned by mechanical rotations. The innovations reported in this research, from concept, design and actuation to application, are relevant to nanoelectromechanical system, nanomedicine, microfluidics and lab-on-a-chip architectures.

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Section: Durability Of Nanomotors How Durable Are These Nanomotors?mentioning

confidence: 85%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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“…Recently, researchers have overcome some of the difficulties with top-drive motors through the use of microball bearings. The reported motor has a diameter of 14 mm, with a maximum power of 307 mW, torque of 5.6 mNm and speeds of 517 rpm [16].…”

Section: Motor Designsmentioning

confidence: 99%

“…Significant progress has been made over the center-pin and slide-bushing arrangements used in the early micromotors, methods such as gas bearings [13,49], microball bearings [16], and magnetic bearings [50,51] have substantially improved the performance output and the operating life of micromotors. For example, the gas bearing developed by the MIT team was capable of supporting an angular speed of up to 1.4 million rpm, with a lifetime exceeding 10 8 revolutions.…”

Section: Design and Fabrication Issuesmentioning

confidence: 99%

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Liu

Friend

Yeo

2010

Acoust. Sci. & Tech.

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Though miniaturization and mass production via integrated circuit fabrication techniques have transformed our society, the methods have yet to be successfully applied to the generation of motion, and as a consequence the many potential benefits of microrobotics has yet to be realized. The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. The scaling analyses show that electrostatic, electromagnetic and piezoelectric actuators all have comparable force scaling characteristics of F / L 2 ; if one employs permanent magnets, electromagnetic forces do not scale as F / L 4 . Though the torque, (, of piezoelectric ultrasonic motors scale rather poorly with ( / L 4 , they have the clear advantage of possessing torque amplitudes some two orders of magnitude larger than motors employing the other transduction schemes at the micro scale.

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“…Due to their complicated construction, the coils of traditional electromagnetic motor are rather difficult to miniaturize. Despite several works have been devoted to develop and manufacture micromotors, there are only few studies available in literature about their design and performance [3][4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Toward Colloidal Motors

Zrı́nyi

Nakano

2017

Period. Polytech. Chem. Eng.

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Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Cited by 79 publications

References 28 publications

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Toward Colloidal Motors

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