Design, fabrication and characterization of a zinc oxide thin-film piezoelectric accelerometer

Saayujya, Chinmoy; Tan, Joel Shi Quan; Yuan, Yanhui; Wong, Yiik Diew; Du, Hejun

doi:10.1109/issnip.2014.6827679

Cited by 13 publications

(6 citation statements)

References 6 publications

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“…It can be seen that the angle of slope for the V out of ZnO Accelerometer is 21°, or the sensitivity of 0.013 V/V only. This result is much lower than the reported result as 0.034 V/V in [14] due to the fact that the piezoelectricity of ZnO is not high enough to generate more V out under high acceleration. However, by using the Z r (t) method, the sensitivity of ZnO A c c e p t e d M a n u s c r i p t accelerometer is improved significantly to 41° which is only 3° lower than the sensitivity of Ref.…”

Section: Evaluation Of Zno Accelerometer By Z R (T)contrasting

confidence: 75%

“…As per described in [14], the mass of proof mass, length, width and thickness of cantilever can affect the resonance of ZnO accelerometer and hence its frequency bandwidth and sensitivity. Theoretically, thicker cantilever has higher resonance frequency and frequency bandwidth but its sensitivity decays accordingly.…”

Section: Design and Fabrication Of Zno Accelerometermentioning

confidence: 99%

“…12. As per discussed in [14], the prototyped ZnO accelerometer was tested up to 0.25V of the driving voltage only. This driving voltage may not be realistic because the measured acceleration can be much higher.…”

Section: Evaluation Of Zno Accelerometer By Z R (T)mentioning

confidence: 99%

“…By supplying an AC excitation voltage to the ZnO accelerometer, the Z E (t) can be actively acquired and correlated with the acceleration of ZnO accelerometer at its mechanical port. In our previous study, a prototyped ZnO accelerometer has been tested based on the output voltage of the ZnO thin film layer [14]. As a continuous effort to improve the sensing capability of prototyped ZnO accelerometer, the proposed method was developed and tested on the same prototype.…”

Section: Introductionmentioning

confidence: 99%

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Development of high sensitivity, large frequency bandwidth ZnO-based accelerometers

Wong

Yuan

et al. 2015

Sensors and Actuators A: Physical

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Section: Evaluation Of Zno Accelerometer By Z R (T)contrasting

confidence: 75%

Section: Design and Fabrication Of Zno Accelerometermentioning

confidence: 99%

Section: Evaluation Of Zno Accelerometer By Z R (T)mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Development of high sensitivity, large frequency bandwidth ZnO-based accelerometers

Wong

Yuan

et al. 2015

Sensors and Actuators A: Physical

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“…Saayujya et al also made an accelerometer with the same structure type using ZnO material. Voltage sensitivity of 1.69 mV/g and natural frequency of 2.19 kHz were realized in this case 22 . Using AlN, Gesing et al fabricated a structure composed of four-symmetric suspension beams with a 510 μg= ffiffiffiffiffiffi Hz p noise density, 0.0981 pC/g charge sensitivity and 19.1 kHz natural frequency 23 .…”

Section: Introductionmentioning

confidence: 82%

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

et al. 2023

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Potentially applied in low-noise applications such as structural health monitoring (SHM), a 1-axis piezoelectric MEMS accelerometer based on aerosol deposition is designed, fabricated, simulated, and measured in this study. It is a cantilever beam structure with a tip proof mass and PZT sensing layer. To figure out whether the design is suitable for SHM, working bandwidth and noise level are obtained via simulation. For the first time, we use aerosol deposition method to deposit thick PZT film during the fabrication process to achieve high sensitivity. In performance measurement, we obtain the charge sensitivity, natural frequency, working bandwidth and noise equivalent acceleration of 22.74 pC/g, 867.4 Hz, 10–200 Hz (within ±5% deviation) and 5.6 $$\mu {{{\rm{g}}}}/\sqrt{{{{\rm{Hz}}}}}$$ μ g / Hz (at 20 Hz). To demonstrate its feasibility for real applications, vibrations of a fan are measured by our designed sensor and a commercial piezoelectric accelerometer, and the results match well with each other. Moreover, shaker vibration measurement with ADXL1001 indicates that the fabricated sensor has a much lower noise level. In the end, we show that our designed accelerometer has good performance compared to piezoelectric MEMS accelerometers in relevant studies and great potential for low-noise applications compared to low-noise capacitive MEMS accelerometers.

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High-sensitivity and low-volume-based piezoelectric MEMS acceleration sensor using PiezoMUMPs

Biswal,

Kumar,

Kar

et al. 2023

J Mater Sci: Mater Electron

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Design, fabrication and characterization of a zinc oxide thin-film piezoelectric accelerometer

Cited by 13 publications

References 6 publications

Development of high sensitivity, large frequency bandwidth ZnO-based accelerometers

Development of high sensitivity, large frequency bandwidth ZnO-based accelerometers

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

High-sensitivity and low-volume-based piezoelectric MEMS acceleration sensor using PiezoMUMPs

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