Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

Xu, Xiaohui; Li, Baoqing; Yan, Feng; Chu, Jiaru

doi:10.1088/0960-1317/17/12/008

Cited by 55 publications

(31 citation statements)

References 20 publications

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“…The research of early MEMS scanning device focuses on the imaging, such as the confocal microscopy [2 -7], the bar code recognition [8], the fingerprint recognition [9], etc. Other applications include the optical coherence tomography technique (OCT) [10], the retinal scan display (RSD) [11], printer, head-up display and the laser radar (LIDAR) in the automated production lines [12,13].…”

Section: Introductionmentioning

confidence: 99%

Optimization and Design of Integrated Space Target

Xue¹

2017

TOEEJ

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Background & Objective:The design and optimization of laser detection system based on MEMS (Micro-electro Mechanical Systems) scanning mirror is presented in the paper. According to requirements of application, it adopts the laser module to design the laser driver circuit, and the designed modulation circuit can satisfy the actual needs. Method:The designed information processing module is composed of the echo receiving module, signal amplification and filter circuit module, and the synchronous circuit of measuring angle and distance, etc. Conclusion:It gives out the distance decoding method and explores the method of capturing echo signal, which can fast and accurately calculate the distance and azimuth information of scanning.

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Section: Introductionmentioning

confidence: 99%

Optimization and Design of Integrated Space Target

Xue¹

2017

TOEEJ

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“…Unlike electromagnetic, piezoelectric, and electrothermal out-of-plane actuators [9][10][11][12], MEMS electrostatic actuators offer a smaller footprint, lower power consumption, and a faster response time.…”

Section: Introductionmentioning

confidence: 99%

A Bi-Directional Out-of-Plane Actuator by Electrostatic Force

et al. 2013

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Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications.

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“…The heat generation should be treated carefully inside the human body [13]. Although piezoelectric driving achieves low power consumption [14], it includes toxic materials such as lead, which is harmful to human body. In terms of low power consumption, electrostatic driving is considered to be a promising method [1,9,[15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation

Kumagai

Ohnishi

Sasaki

2012

JAMDSM

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Wireless driving of a micromirror device is achieved by electromagnetic excitation tuned to the mechanical resonance of the mirror rotation. The micromirror used is designed for low-voltage-driving. Static mirror rotation angle is 7.7 deg. at 12 V bias. The micromirror is connected to a coil for receiving the driving energy through electromagnetic induction. Magnetic field of 19.3 mT at the surface of the first coil induces 0.6 V at the second coil that is 24 mm apart from the first coil. An LC resonance circuit is incorporated in the second coil system to enhance the induced voltage. The LC resonance frequency is tuned to induce the mechanical resonance of the micromirror device. When the separation distance between the first and second coils is 24 mm, the voltage induced by the LC resonance is 1.43 V. Mirror rotation angle is 0.3 deg. for half stroke is achieved. It is expected that the rotation angle is expanded by increasing the Q factors of the electrical circuit and mechanical resonance of the micromirror. These will be achieved by reducing the loss in the electrical circuits and packaging the micromirror device in vacuum with hermetic seal.

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Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

Cited by 55 publications

References 20 publications

Optimization and Design of Integrated Space Target

Optimization and Design of Integrated Space Target

A Bi-Directional Out-of-Plane Actuator by Electrostatic Force

Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation

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