2005
DOI: 10.3182/20050703-6-cz-1902.01214
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Design, Fabrication, and Control of a High-Aspect Ratio Microactuator for Vibration Suppression in a Hard Disk Drive

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Cited by 13 publications
(8 citation statements)
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“…Some applications are structures with active control [1][2][3], mechatronics [4][5][6][7], mechanisms [8][9][10][11][12][13], microelectrical mechanical systems (MEMS) [14][15][16], and chemical processing applications [17,18]. These applications include important systems such as robotics [19], aeronautical structures, machine tools, sensors and automotive applications [20,21].…”
Section: Introductionmentioning
confidence: 99%
“…Some applications are structures with active control [1][2][3], mechatronics [4][5][6][7], mechanisms [8][9][10][11][12][13], microelectrical mechanical systems (MEMS) [14][15][16], and chemical processing applications [17,18]. These applications include important systems such as robotics [19], aeronautical structures, machine tools, sensors and automotive applications [20,21].…”
Section: Introductionmentioning
confidence: 99%
“…(6), but does not require the solution of Eqs. (1)- (5). Of course, if the point does happen to be on the Pareto frontier, then b C v ÂĽ C v .…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3]), micro-electrical mechanical systems (MEMS, e.g., Refs. [4,5]), and robotics and mechatronics (e.g., Refs. [6][7][8]).…”
Section: Introductionmentioning
confidence: 99%
“…Coupled systems reported in the literature are in diverse areas including structural systems with active control [e.g., Haftka et al (1986); Rao and Pan (1990)], micro-electrical mechanical systems, or MEMS [e.g., Carley et al (2001); Oldham et al (2005)], and robotics and mechatronics [e.g., Ravichandran et al (2006); Zhu et al (2001)]. In robotic applications, typical objectives for the artifact design are minimizing weight or minimizing deflection.…”
Section: Introductionmentioning
confidence: 99%