2022
DOI: 10.3390/mi13071142
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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

Abstract: Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To a… Show more

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Cited by 8 publications
(4 citation statements)
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“…Better conductivity will bring better sensing performance. 13 At the same time, according to the Joule heating principle, conductive materials can convert electric energy into heat energy, 14,15 so it is possible to have both sensing performance and heatable performance, and having these two functions at the same time will make wearable products both intelligent and comfortable.
Figure 1.Principle of piezoresistive pressure sensor.
…”
Section: Introductionmentioning
confidence: 99%
“…Better conductivity will bring better sensing performance. 13 At the same time, according to the Joule heating principle, conductive materials can convert electric energy into heat energy, 14,15 so it is possible to have both sensing performance and heatable performance, and having these two functions at the same time will make wearable products both intelligent and comfortable.
Figure 1.Principle of piezoresistive pressure sensor.
…”
Section: Introductionmentioning
confidence: 99%
“…Piezoresistive mechanical sensors have attracted much attention for monitoring subtle mechanical forces, owing to their advantages of facile fabrication, 18 low power consumption, 19 and easy integration. 20 The sensitive layer of piezoresistive sensor deforms when external pressure is applied, thus affecting the signal output. 21 Piezoresistive sensors can be classified into strain sensors and pressure sensors according to the monitored mechanical modes.…”
Section: ■ Introductionmentioning
confidence: 99%
“…For these exceptional performances, such as linearity, great sensitivity to pressure, and its small size. The piezoresistive pressure sensor is the most widespread among pressure sensors, which makes it the most widely used in many areas [1][2][3][4][5][6]. Nevertheless, their major drawback is the temperature drifts [7][8][9][10][11], especially those generated by self-heating due to the applied electrical potential.…”
Section: Introductionmentioning
confidence: 99%