Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

Annamalai, Meenakshi; Mathew, S.; Viswanathan, Vignesh; Fang, Chengcheng; Pickard, D. S.; Palaniapan, M.

doi:10.1109/transducers.2011.5969824

Cited by 10 publications

(9 citation statements)

References 9 publications

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“…Graphene, a two-dimensional (2D) allotrope of carbon where carbon atoms are arranged in a honeycomb structure made out of hexagons, has been the subject of many fascinating studies since its discovery. 1 Its unexpected stability, 2,3 combined with nearly massless behavior of its charge carriers makes it a unique choice for nano-electronic, 4 interconnect, 5 and thermal management applications. 6 For example, high frequency FETs, 7 gas sensors, 8 and solar cells 9 made out of graphene have already been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Mega-electron-volt proton irradiation on supported and suspended graphene: A Raman spectroscopic layer dependent study

Mathew

Chan

Zhan

et al. 2011

Journal of Applied Physics

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Graphene samples with 1, 2, and 4 layers and 1 þ 1 folded bi-layers and graphite have been irradiated with 2 MeV protons at fluences ranging from 1 Â 10 15 to 6 Â 10 18 ions/cm 2 . The samples were characterized using visible and UV Raman spectroscopy and Raman microscopy. The ion-induced defects were found to decrease with increasing number of layers. Graphene samples suspended over etched holes in SiO 2 have been fabricated and used to investigate the influence of the substrate SiO 2 for defect creation in graphene. While Raman vibrational modes at 1460 cm À1 and 1555 cm À1 have been observed in the visible Raman spectra of substantially damaged graphene samples, these modes were absent in the irradiated-suspended monolayer graphene.

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Section: Introductionmentioning

confidence: 99%

Mega-electron-volt proton irradiation on supported and suspended graphene: A Raman spectroscopic layer dependent study

Mathew

Chan

Zhan

et al. 2011

Journal of Applied Physics

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“…Atomically thin graphene has extraordinary mechanical properties [ 3 ], and graphene nanomechanical resonators have been employed as various sensors [ 42 – 46 ]. Yet, the sensitivity at room temperature is limited by a rather low quality factor.…”

Section: Resultsmentioning

confidence: 99%

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Deinhart¹,

Kern²,

Kirchhof³

et al. 2021

Beilstein J. Nanotechnol.

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Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.

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“…1,2 HIM has been successfully employed for surface patterning and nanofabrication. [2][3][4][5][6][7][8][9][10][11][12] Here, we demonstrate how HIM can be applied for precise modification of bulk material properties.…”

mentioning

confidence: 80%

Creation and physical aspects of luminescent patterns using helium ion microscopy

Veligura

Hlawacek

Jahn

et al. 2014

Journal of Applied Physics

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A flexible luminescent probe to monitor fast ion losses at the edge of the TJ-II stellarator Rev. Sci. Instrum. 79, 093511 (2008); 10.1063/1.2979013 Ion-beam luminescence of thin-film CdS on glass formed by pulsed-laser depositionThe helium ion microscope provides a sub-nanometer size He þ ion beam which can be employed for materials modification. We demonstrate how material properties can be tuned in a helium ion microscope with very high precision using, as an example, the modification of the luminescence properties of a sodium chloride crystal. Although the beam size is extremely small, the actually affected sample volume is much bigger due to collision cascades. We have directly measured the diameter of the interaction volume of the 35 keV He þ beam with a sodium chloride crystal using ionoluminescence. The experimental results are compared to stopping and range of ions in matter simulations and calculations of the point spread function. V C 2014 AIP Publishing LLC.

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Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

Cited by 10 publications

References 9 publications

Mega-electron-volt proton irradiation on supported and suspended graphene: A Raman spectroscopic layer dependent study

Mega-electron-volt proton irradiation on supported and suspended graphene: A Raman spectroscopic layer dependent study

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Creation and physical aspects of luminescent patterns using helium ion microscopy

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