Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

Saggere, Laxman; Hagood, Nesbitt W.; Roberts, David C.; Li, H.-Q.; Steyn, Jacques; Turner, Kevin T.; Carretero, Jorge A.; Yaglioglu, Onnik; Su, Yufeng; Mlcak, Richard; Spearing, S. Mark; Breuer, Kenneth S.; Schmidt, Martin

doi:10.1109/isaf.2000.941559

Cited by 13 publications

(13 citation statements)

References 3 publications

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“…Li from the Massachusetts Institution of Technology in America produced a piezoelectric driven high flow rate micropump driven by piezoelectric stack [8]. Michael from Southampton University in Australia developed a micropump based on thick film (100 μm) piezoelectric actuation [9] ( Fig.…”

Section: Present Classification Of Piezoelectric Pumpsmentioning

confidence: 99%

“…Rife from the US Navy National Laboratory produced miniature valveless ultrasonic pumps and mixers under the high-frequency effects on the basis of valveless mechanism [52]. Saggere from the Massachusetts Institute of Science and Technology produced the piezoelectric driven high flow rate micropump by using the piezoelectric vibrator of stacked piles [53].…”

Section: Valveless Piezoelectric Pumpmentioning

confidence: 99%

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Present situation and classification of piezoelectric pump

Wang

Cheng

et al. 2009

Front. Mech. Eng. China

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According to the present classification method for a piezoelectric pump, this paper reviews the development and present situation of piezoelectric pumps in the latest 30 years and finally puts forward a new classification. A volumetric piezoelectric pump, which belongs to traditional volumetric pumps, can be divided into a piezoelectric pump with or without valves. A new valveless piezoelectric pump nowadays becomes a hot issue in scientific research. It is constructed by using nomoving-part valves, which can induce positive flow resistance and negative flow resistance different, and in which the inlet and outlet are connected all the time. New forms of piezoelectric pumps, different from traditional ones, are only at the stage of conception and principle, and no practical application has been reported.Keywords piezoelectric pump, development and present situation, new classification method, valveless piezoelectric pump, new forms of piezoelectric pump

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Section: Present Classification Of Piezoelectric Pumpsmentioning

confidence: 99%

Section: Valveless Piezoelectric Pumpmentioning

confidence: 99%

Present situation and classification of piezoelectric pump

Wang

Cheng

et al. 2009

Front. Mech. Eng. China

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“…Micro-pumps have been developed by using several actuation methods, such as electromagnetic (Böhm et al 1999), piezoelectric (Stemme and Stemme 1993;Olsson et al 1996;Koch et al 1998;Saggere et al 2000;Suzuki and Yoneyama 2003;Yang et al 2004;Li et al 2005), shape memory alloy (Benard et al 1998), electrostatic (Francais et al 1997;Teymoori and Abbaspour-Sani 2005), and thermo-pneumatic (Takao et al 2003) devices. Most of them have complex structures and high power consumption.…”

Section: Introductionmentioning

confidence: 99%

Development and application of a diaphragm micro-pump with piezoelectric device

Hou

et al. 2007

Microsyst Technol

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In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 28 mm 9 5 mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow and alters the chamber volume by the curvature change of a diaphragm. Several experimental set-ups for performance tests in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system are designed and implemented. The performance of a one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.

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“…Micro-pumps have been developed using several actuation methods, such as electromagnetic [1], piezoelectric [2][3][4][5], shape memory alloy [6], electrostatic [7], and thermopneumatic [8]. Most of them have complex structures and lower pumping rates.…”

Section: Introductionmentioning

confidence: 99%

Development of a Micro-diaphragm Pump with Piezoelectric Device

Hou

et al. 2007

Twenty-Third Annual IEEE Semiconductor Thermal Measurement and Management Symposium

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In this study, a new design of MaHou one-side actuating micro-diaphragm pump with piezoelectric device has been successfully developed by using its harmonic resonance of working fluid with system components (valve, diaphragm) in the pump chamber. The micro-diaphragm pump with two valves is fabricated in aluminum case by using highly accurate CNC machine, and cross-section dimensions are 5mm×28mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed notebook water cooling system are designed and executed. The performance of one-side actuating microdiaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the ranges of operation frequency 70-180 Hz. It can be applied in a liquid cooling system for notebook computer or in other related areas. KeywordsMicro-diaphragm pump, piezoelectric effect, liquidcooling, valve Nomenclature F Frequency [Hz] Q Volume flow rate [ml/min] Th Temperature of the dummy heater [ ]

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Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

Cited by 13 publications

References 3 publications

Present situation and classification of piezoelectric pump

Present situation and classification of piezoelectric pump

Development and application of a diaphragm micro-pump with piezoelectric device

Development of a Micro-diaphragm Pump with Piezoelectric Device

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