Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Chang, Honglong; Shen, Qiang; Zhou, Zhiyong; Xie, Jian; Jiang, Qinghua; Yuan, Weizheng

doi:10.3390/s100403835

Cited by 10 publications

(5 citation statements)

References 30 publications

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“…Table IV compares the proposed final design with existing MEMS accelerometers. It can be noted that even though the processes used in [12], [13] permit a larger seismic mass thickness than the process used in this paper, the designs presented here still achieve a reduction in area. The table also shows that the proposed design has a low resonant frequency which translates to a high mechanical sensitivity and capacitive sensitivity.…”

Section: Resultsmentioning

confidence: 97%

Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

et al. 2013

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This paper presents three different designs of three-axis accelerometers using a thick epitaxial surface micromachining process. The designs have a common serpentine spring topology, providing a resonant frequency of around 1.5 kHz, with a spring length of 350 μm and have capacitive sensitivities in the region of 5 to 10 fF/g for the X and Y sensing. The Z-axis sensing is performed by means of torsional springs of 370 μm in length. The sensing techniques include varying gap differential combs for the XY-axes; varying gap differential electrodes and varying overlap area for the Z-axis. The acceleration range for all designs is ±10 g and the overall sensitivity was increased by having a large nominal capacitance.

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Section: Resultsmentioning

confidence: 97%

Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

et al. 2013

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“…During the initial movement of Ambubot, three distinct input data types, namely the gyroscope, accelerometer, and magnetic compass, were employed. The gyroscope measured the angular rate on each of the three axes in degrees or revolutions per second (Chang et al 2010) and also served as an input to update the angular position. The accelerometer, on the other hand, measured the acceleration in grams, while the magnetic compass data measured the magnetic field in gauss (Tan and Park 2005;Bird and Arden 2011).…”

Section: Observation Modulementioning

confidence: 99%

Implementation of extended kalman filter for localization of ambulance robot

Yang,

Samani,

Tang

et al. 2024

Int J Intell Robot Appl

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This paper focuses on the implementation of the Extended Kalman Filter for indoor localization of a semi-autonomous Ambulance Robot system named Ambubot. The system is designed to reduce the response time for lay rescuers to locate an Automated External Defibrillator (AED) during sudden cardiac arrest events. To achieve this objective, the robot is equipped with an AED, and the Extended Kalman Filter is utilized for optimal indoor localization. The filter is implemented using data from the robot’s Inertial Measurement Unit, which comprises 9 Degrees of Freedom. The paper provides an explicit description of the performance of the Extended Kalman Filter in estimating the position of Ambubot, and demonstrates that the proposed approach is effective in accurately determining and estimating the robot’s position in unknown indoor environments. The results suggest that the proposed method is a promising solution for improving survival rates in cardiac arrest cases, and may have potential applications in other fields where accurate indoor localization is required.

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“…Pressure can be indirectly measured as a voltage based on the piezoresistive effect as a transduction method. Another example can be found in [ 21 ], where the design, fabrication and testing of a bulk micromachined inertial measurement unit is presented.…”

Section: Semiconductor Manufacturing: From Silicon To Sensorsmentioning

confidence: 99%

Improving Electronic Sensor Reliability by Robust Outlier Screening

Moreno-Lizaranzu

Cuesta

2013

Sensors

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Electronic sensors are widely used in different application areas, and in some of them, such as automotive or medical equipment, they must perform with an extremely low defect rate. Increasing reliability is paramount. Outlier detection algorithms are a key component in screening latent defects and decreasing the number of customer quality incidents (CQIs). This paper focuses on new spatial algorithms (Good Die in a Bad Cluster with Statistical Bins (GDBC SB) and Bad Bin in a Bad Cluster (BBBC)) and an advanced outlier screening method, called Robust Dynamic Part Averaging Testing (RDPAT), as well as two practical improvements, which significantly enhance existing algorithms. Those methods have been used in production in Freescale® Semiconductor probe factories around the world for several years. Moreover, a study was conducted with production data of 289,080 dice with 26 CQIs to determine and compare the efficiency and effectiveness of all these algorithms in identifying CQIs.

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Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Cited by 10 publications

References 30 publications

Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

Implementation of extended kalman filter for localization of ambulance robot

Improving Electronic Sensor Reliability by Robust Outlier Screening

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