Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications

Zhou, Mao; Zhou, Shiwei; Zhou, Zhizhong; Jiang, Shuwen; Zhang, Wanli

doi:10.1016/j.sna.2024.116151

Sensors and Actuators A: Physical

2025

DOI: 10.1016/j.sna.2024.116151

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Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications

Mao Zhou,

Shiwei Zhou,

Zhizhong Zhou

et al.

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Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications

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References 37 publications

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