Design Method of ILQ Servo System with Tracking Robustness

Kunimatsu, Sadaaki; Fujii, Takao

doi:10.1016/s1474-6670(17)35717-8

Cited by 3 publications

References 4 publications

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Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method

Matsumoto¹,

Suzuki²,

Kunimatsu³

et al.

Proceedings of the 2004 IEEE International Conference on Control Applications, 2004.

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In this paper, we consider control system synthesis for temperature control of a wafer in the semiconductor manufacturing system by using Model Reference Inverse Linear Quadratic (abbreviated as MR-ILQ) control, which was proposed by the third and fourth authors [ll, as one of its significant applications in the industry process. First, we apply the subspace method [Z], [3] to obtain a mathematical model described by multi-input multi-output state space representations for temperature dynamies of the wafer. Second, we design a robust servo system for tracking a step reference input without steady state error based on the MR-ILQ design method. Since this method yields not only robust steady state tracking but also robust transient tracking, it is possible to design B temperature control system with higher robust performance. Third, we show the efficiency of the above control system synthesis by experiment

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Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method

Matsumoto¹,

Suzuki²,

Kunimatsu³

et al.

Proceedings of the 2004 IEEE International Conference on Control Applications, 2004.

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Analysis and synthesis of model reference ILQ servo system using robust L/sub ∞/ performance measure for a fixed input

Kunimatsu

Fujii

42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475)

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Absbnct-A robustness problem of output trajectories is consided here in the design of servo systems. Our purpose is to design a robust servo system with tracking robustness in that its output trajectory remains io a neighborhood of the nominal trajectory when the dynamics of the system is perturbed. For this purpose we propose a control configuration of robust servo system with a conditional feedback. In this configuration the robust servo system is designed b j the Inverse Linear Quadratic (ILQ) design method as proposed by the second author, and the conditional feedback is added to achieve tracking robustness of the output response. First, we state the configuration of this servo system and then provide a theoretical basis for parameter tuning. Second, we consider analysis and synthesis of model reference ILQWR-ILQ) servo systems by using the robust Cm performance measure for a fixed input. Finally, we illustrate a numerical example to show the validity of our results.

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Robust Stability and Performance Evaluation of an ILQ Optimal Current-Control System for Permanent Magnet Synchronous Motors via ^|^mu;-Analysis

Takami

Tsujino

Fujii

2003

T. SICE

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Design Method of ILQ Servo System with Tracking Robustness

Cited by 3 publications

References 4 publications

Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method

Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method

Analysis and synthesis of model reference ILQ servo system using robust L/sub ∞/ performance measure for a fixed input

Robust Stability and Performance Evaluation of an ILQ Optimal Current-Control System for Permanent Magnet Synchronous Motors via ^|^mu;-Analysis

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