Design methodologies for robust nano-positioning

Sebastian, Abu; Salapaka, Srinivasa M.

doi:10.1109/tcst.2005.854336

Cited by 286 publications

(168 citation statements)

References 16 publications

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“…Because tube scanners often lack X-Y sensors, much of the original advanced feedback control work was done in the Z direction [59], [86], while feedforward controllers were developed for the X-Y motions [74], [81], [82]. The advent of sensored X-Y stages has led to feedback control methods being developed for X-Y motions as well [87], [88]. Combined feedforward and feedback controllers have also been investigated for both the Z and X motions [89], [90], [91].…”

Section: Feedback Controllermentioning

confidence: 99%

“…These include efforts geared at increasing the performance of conventional tube scanner-based microscopes through understanding and compensating for the nonlinear effects of hysteresis, creep, and varying voltage response [74], [102]. Many researchers have attacked the speed of measurement problem with approaches including a redesign of the actuator to achieve higher bandwidth [76], and applications of modern control theory to increase the scanning speed [74], [81], [82], [87], [88], [89]. These methods are discussed in more detail in [61].…”

Section: Advanced Afm Control Topicsmentioning

confidence: 99%

“…In particular, the use of H ∞ in the feedback path only is described in [59], [87], [88] . The use of combined feedforward/feedback controllers is discussed using H ∞ [89], [91], ℓ 1 [90], and model-inverse based methods [68], [74].…”

Section: Advanced Afm Control Topicsmentioning

confidence: 99%

See 2 more Smart Citations

A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes

Abramovitch

Andersson

Pao

et al. 2007

2007 American Control Conference

185

128

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Abstract-The Atomic Force Microscope (AFM) is one of the most versatile tools in nanotechnology. For control engineers this instrument is particularly interesting, since its ability to image the surface of a sample is entirely dependent upon the use of a feedback loop. This paper will present a tutorial on the control of AFMs. We take the reader on a walk around the control loop and discuss each of the individual technology components. The major imaging modes are described from a controls perspective and recent advances geared at increasing the performance of these microscopes are highlighted.

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Section: Feedback Controllermentioning

confidence: 99%

Section: Advanced Afm Control Topicsmentioning

confidence: 99%

See 1 more Smart Citation

A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes

Abramovitch

Andersson

Pao

et al. 2007

2007 American Control Conference

185

128

View full text Add to dashboard Cite

show abstract

“…Multi-axis stages are commonly considered decoupled systems, and cross-coupling between channels is ignored ( [13], [14], [15], [1] and the references therein). Behind this trend is the fact that the flexible structure of nanopositioning stages makes the coupling negligible when operating at very low speed [14].…”

Section: Introductionmentioning

confidence: 99%

Feedforward/feedback multivariable control design for high speed nanopositioning

Mohamed

Heath

Lanzon

2014

2014 European Control Conference (ECC)

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Abstract-This paper proposes a two degree of freedom control using a combined feedforward/feedback architecture for MIMO nanopositioning stages. The proposed control system provides higher bandwidth and better performance compared with a single degree of freedom feedback controller. The paper proposes a systematic synthesis methodology to design the controller based on closed loop performance. The results are verified via simulation and hardware experiment.

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“…In this design, the actuations in different directions are completely decoupled, however, the fast scan axis is predefined. 3,20 In another class, referred to as rigid scanners, 19,21 the three sets of piezo stack actuators for three scan directions (x, y, and z) are implemented on a flexure based nano-positioner. 14,19,21 In this design, the actuators are to a large extent decoupled while operating in a parallel fashion.…”

Section: Introductionmentioning

confidence: 99%

Compensator design for improved counterbalancing in high speed atomic force microscopy

Bozchalooi

Burns

Fantner

2011

Review of Scientific Instruments

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High speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-ofplane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds.

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Design methodologies for robust nano-positioning

Cited by 286 publications

References 16 publications

A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes

A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes

Feedforward/feedback multivariable control design for high speed nanopositioning

Compensator design for improved counterbalancing in high speed atomic force microscopy

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