Design, modeling, and control of a monolithic compliant x-y-θ microstage using a double-rocker mechanism

Yang, Yiling; Wu, Gaohua; Wei, Yanding

doi:10.1016/j.precisioneng.2021.03.014

Cited by 17 publications

(3 citation statements)

References 39 publications

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“…The material properties of the PSA are defined as: the density of 7600 kg/m 3 , Young’s modulus of 75 Gpa, and Poisson’s ratio of 0.32. 43 The modal analysis of the stage with PSAs is presented in Figure 6(d)–(f). The response frequencies are 417.61, 417.68, and 527.68 Hz along the x -, y -, and θ -directions, respectively.…”

Section: Design Of the Nanopositioning Systemmentioning

confidence: 99%

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Yang

et al. 2023

Proceedings of the Institution of Mechanical Engineers, Part C:

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The article covers structural design and disturbance rejection control of a flexure-based compliant piezoelectric nanopositioning stage. The stage is devised using four-bar amplification mechanisms, auxiliary guiding mechanisms, and a compound parallelogram mechanism. Static and dynamic models of compliant mechanisms are analyzed based on a compliance matrix method. A modified Prandtl-Ishlinskii (PI) model with dead zone operators is used to describe the asymmetric hysteresis. Then, a global electromechanical dynamic model is built and identified. A comprehensive disturbance rejection controller (CDRC) combining a robust H∞ control and a disturbance observer-based (DOB) control is proposed for high trajectory tracking accuracy and anti-disturbance performance. The trajectory tracking accuracy of the stage can be up to 3 nm in experiments. As amplitudes of reference signals increases, relative tracking errors gradually decrease. System instability and oscillation caused by strong external disturbances are also reduced. Experimental results prove the effectiveness of the developed CDRC.

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Section: Design Of the Nanopositioning Systemmentioning

confidence: 99%

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Yang

et al. 2023

Proceedings of the Institution of Mechanical Engineers, Part C:

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“…So, a right circular notched flexible unit (θ x ) can be represented by R(N, u). P (n) represents a translational degree of freedom (Yang et al, 2021). So, a translational flexible unit (δz) can be represented by P (n).…”

Section: Synthesis Of the Compliant Suitable Constrained Branchmentioning

confidence: 99%

“…The advantages of CPMs compared with their rigid-body counterparts have raised a growing interest in developing the methods for their conceptual synthesis. The three main synthesis approaches in this challenging area are the pseudorigid-body model (PRBM) approach (Cannon and Howell, 2005;Moon et al, 2013;Yang et al, 2021), freedom and constraint topology (FACT) approach (Hopkins and Culpepper, 2010a, b;Yu et al, 2011Yu et al, , 2015Yu et al, , 2016, and topology optimization approach (Bowen et al, 2013;Liang et al, 2020;Emmendoerfer et al, 2020). For example, a compliant parallel mechanism with high precision and a wide working area is presented using the new flexure hinges (Kozuka et al, 2012).…”

Section: Introductionmentioning

confidence: 99%

Type synthesis approach for the 2R1T compliant parallel mechanism with a suitable constrained branch

Zhou

Sun

et al. 2022

Mech. Sci.

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Abstract. In the aerospace field, the precision and stiffness for 2R1T (R denotes the rotation and the T denotes the translation) degree of freedom (DOF) space posture adjustment mechanisms are required. Compliant parallel mechanisms (CPMs) with a suitable constrained branch (SCB) have the advantages of high precision and high stiffness. Based on screw theory, a new type synthesis approach for a 2R1T compliant parallel mechanism with a suitable constrained branch is proposed. The proposed approach is an improvement of the freedom and constraint topology approach. It combines with other methods, including the rigid-body-replacement method, the principle of symmetry, etc. In order to obtain CPMs with a suitable constrained branch, the criterion for the type synthesis is presented. Using this proposed type synthesis approach, a series of CPMs is obtained. They include, but are not limited to, the existing typical 2R1T CPMs with a suitable constrained branch. Furthermore, it identifies the correctness and effectiveness of the approach by analyzing the DOF of the synthesized mechanism. This approach is also suitable for the type synthesis of 4, 5, and 6 DOF compliant parallel mechanisms with a suitable constrained branch.

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Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

Wu,

Li,

Yang

et al. 2024

Microsyst Technol

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Design, modeling, and control of a monolithic compliant x-y-θ microstage using a double-rocker mechanism

Cited by 17 publications

References 39 publications

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Type synthesis approach for the 2R1T compliant parallel mechanism with a suitable constrained branch

Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

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