Design, modeling and optimization of a multilayer diaphragm used in optical pressure sensor

Abstract

Multilayer diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both optical sensor and common sensor. A simplified model is introduced to reduce the CPU time. Characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro.