Design, modeling, and testing of a novel 6-DOF micropositioning stage with low profile and low parasitic motion

Moon, Jun-Hee; Pahk, Heui Jae; Lee, Bong-Gu

doi:10.1007/s00170-010-3033-4

Cited by 22 publications

(8 citation statements)

References 22 publications

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“…The roles of precision positioning technology have become increasingly important in various industry fields, such as nano-imprint [1], cell operation [2], scanning probe microscopes [3], optical instruments [4], measurement systems [5,6] and micro/nano manipulations [7,8,9], a precision positioning system possesses such advantages as high positioning accuracy, fast response speed, satisfactory stability and dynamic characteristics. It mainly composed of drives, guide mechanism and operation ending three parts.…”

Section: Introductionmentioning

confidence: 99%

Modeling and controller design of a 6-DOF precision positioning system

Cai

Tian

Liu

et al. 2018

Mechanical Systems and Signal Processing

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Section: Introductionmentioning

confidence: 99%

Modeling and controller design of a 6-DOF precision positioning system

Cai

Tian

Liu

et al. 2018

Mechanical Systems and Signal Processing

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“…In the literature, several works can be found involving the identification of vibratory dynamics of high precision motion stages using finite element analysis (FEA) [6][7][8][9][10][11]. While in [6][7][8]10,11] a precision positioning stage or some of its components were analyzed, in [9] different design alternatives for an ultraprecision micro-milling machine are evaluated.…”

Section: Introductionmentioning

confidence: 99%

“…While in [6][7][8]10,11] a precision positioning stage or some of its components were analyzed, in [9] different design alternatives for an ultraprecision micro-milling machine are evaluated. In this paper, instead of FEA, modal analysis is carried out by direct experimentation using impact testing with a hammer and two different accelerometers.…”

Section: Introductionmentioning

confidence: 99%

Modal Analysis, Metrology, and Error Budgeting of a Precision Motion Stage

Okyay

Erkorkmaz

Khamesee

2018

JMMP

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Abstract:In this study, a precision motion stage, whose design utilizes a single shaft supported from the bottom by an air bearing and voice coil actuators in complementary double configuration, is evaluated for its dynamic properties, motion accuracy, and potential machining force response, through modal testing, laser interferometric metrology, and spectral analysis, respectively. Modal testing is carried out using two independent methods, which are both based on impact hammer testing. Results are compared with each other and with the predicted natural frequencies based on design calculations. Laser interferometry has been used with varying optics to measure the geometric errors of motion. Laser interferometry results are merged with measured servo errors, estimated thermal errors, and the predicted dynamic response to machining forces, to compile the error budget. Overall accuracy of the stage is calculated as peak-to-valley 5.7 µm with a 2.3 µm non-repeatable part. The accuracy measured is in line with design calculations which incorporated the accuracy grade of the encoder scale and the dimensional tolerances of structural components. The source of the non-repeatable errors remains mostly equivocal, as they fall in the range of random errors of measurement in laser interferometry like alterations of the laser wavelength due to air turbulence.

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“…The roles of precision positioning technology have become increasingly important in various industry fields, such as nanoimprint, cell operation, scanning probe microscopes, high density data recording, optical instruments, measurement systems and micro/nano manipulations [1][2][3][4][5][6][7][8][9], a precision positioning system possesses such advantages as high positioning accuracy, fast response speed, satisfactory stability and dynamic characteristics. It mainly composed of drives, guide mechanism and operation ending three parts.…”

Section: Introductionmentioning

confidence: 99%

Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling

Cai

Tian

Yang

et al. 2015

2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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A novel 6-DOF precision positioning system is designed in this paper, which is assembled by two type 3-DOF precision positioning stages. Each stage is driven by three piezoelectric actuators (PEAs), and guided by three symmetric Tshape hinges and three elliptical flexible hinges, respectively. The kinematics of this 6-DOF system are investigated. According to an effective kinematic model, the transformation matrix are obtained, which provides a useful tool to predict an output displacement. In addition, the dynamic model of the 6-DOF system is established. The PEAs can be treated as a force generator with a built-in spring-damper component. Furthermore, the characteristics of the 6-DOF system are evaluated in this paper by the FEM simulation. The design structure provides the high dynamic bandwidth. Meanwhile, the experiment is performed to verify the 6-DOF stage has a good characteristic.

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Design, modeling, and testing of a novel 6-DOF micropositioning stage with low profile and low parasitic motion

Cited by 22 publications

References 22 publications

Modeling and controller design of a 6-DOF precision positioning system

Modeling and controller design of a 6-DOF precision positioning system

Modal Analysis, Metrology, and Error Budgeting of a Precision Motion Stage

Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling

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