Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage

Li, Yangmin; Xiao, Shunli; Xi, Longquan; Wu, Zhigang

doi:10.1007/s12541-014-0394-x

Cited by 68 publications

(19 citation statements)

References 14 publications

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“…1,2 Many researches have been performed to design or analyze the compliant positioning stages in recent years. [3][4][5][6][7][8][9][10][11][12] Hui Tang et al proposed a compliant two degrees of freedom (DOFs) micro-nano positioning stage. 3 Wang Hua et al carried out a deep investigation on the input coupling analysis and optimal design of the three DOFs compliant micro-positioning stage.…”

Section: Introductionmentioning

confidence: 99%

“…5 Qiliang Wang et al paid much attention to the fatigue reliability of planar compliant micropositioning stages. 6 In addition, X. Jia et al, 7 Yangmin Li et al, 8 Kee-Bong Choi et al 9 and so on [10][11][12] made great efforts on the development of compliant positioning stages. With the rapid developments of compliant mechanisms and micro-nano technologies, compliant positioning stages will be more widely applied in the future.…”

Section: Introductionmentioning

confidence: 99%

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Displacement measurement of the compliant positioning stage based on a computer micro-vision method

Zhang

Wang

et al. 2016

AIP Advances

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We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscopy, a high resolution CCD camera and the proposed algorithm, an extremely high measuring precision is achieved. Various simulations and experiments are conducted. The simulation results demonstrate that the matching precision can reach to 0.01 pixel when the noise interference is low. A laser interferometer measurement system (LIMS) is established for comparison. The experimental results indicate that the proposed method possesses the same performance as the LIMS but exhibits a greater flexibility and operability. The measuring precision can theoretically attain to 2.83 nm/pixel.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Displacement measurement of the compliant positioning stage based on a computer micro-vision method

Zhang

Wang

et al. 2016

AIP Advances

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“…Precise linear motion stage (PLMS) plays an important role in engineering area, especially in high-accuracy motion system, i.e. optoelectronic packaging system [1][2] . Thus, for a PLMS, positioning accuracy (PA) is one of the most significant parameter.…”

Section: Introductionmentioning

confidence: 99%

A practical approach based on stream of variation for positioning accuracy in precise linear motion stage

Tang¹,

Duan²,

Zheng³

et al. 2016

Proceedings of the 2016 3rd International Conference on Mechatronics and Information Technology

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a tanghaocsu@csu.edu.cn Keywords: positioning accuracy; stream of variation; precise linear motion stage. Abstract. This paper introduces a new analyzing approach on positioning accuracy (PA) in precise linear motion stage (PLMS). As one of the most important parameter, PA is affected by several reasons for the quality of PLMS, such as machining error, assembly error and controller accuracy etc. Conventional method only focuses on one aspect leading to positioning error (PE), which is not systematically and comprehensively. By adopting new analyzing approach, it is obviously understandable how errors from each part in PLMS give impact on PA and how PE accumulates. In this paper, the measuring result of PA is studied firstly. Then related factors affecting PA are concluded through analyzing characters in the measurement result of PA such as fluctuation, repeatability uncertainty and backlash. A series of analysis leading to these factors are introduced, including motor output, screw and assembly error, and an error model for PA in PLMS is established. A case study of one PLMS based on the new analysis procedure is developed, and corresponding experiments are carried out to collect the data. For one PLMS, this new approach on PA is not only beneficial for error compensation, but also helpful in design part. Furthermore, it is a systematic approach in PA analyzing procedure, which is also a new way to weigh PA in PLMS.

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“…CPMs are used to transmit/transform displacements, forces and energy via the deflection of their flexible parts, rather than employing traditional sliding or rolling interfaces [1]. The application of CPMs has been experiencing a rapid increase due to their advantages such as high precision, simplified manufacture, low part count, and ability to miniaturize [2][3][4][5][6]. Planar translational CPMs [7] play a very important role in a variety of fields such as the atomic force microscope [8,9], micro-assembly [10], data storage [11], and MEMS process [12].…”

Section: Introductionmentioning

confidence: 99%

A constraint and position identification (CPI) approach for the synthesis of decoupled spatial translational compliant parallel manipulators

Hao

2015

Mechanism and Machine Theory

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Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage

Cited by 68 publications

References 14 publications

Displacement measurement of the compliant positioning stage based on a computer micro-vision method

Displacement measurement of the compliant positioning stage based on a computer micro-vision method

A practical approach based on stream of variation for positioning accuracy in precise linear motion stage

A constraint and position identification (CPI) approach for the synthesis of decoupled spatial translational compliant parallel manipulators

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