Design, Modelling and Fabrication of Multi-directional Inertial Sensor

Abstract

This research paper presents the analysis of multi-directional capacitive MEMS (Microelectromechanical system) based inertial sensors. Mathematical modelling has been derived for the proposed structures, beam constant and displacement analysis have been done. The displacement momentum and natural frequency analysis are studied and simulated using COMSOL Multiphysics software. Mathematical modelling and simulation were done for the accelerometer for up to 30g and the capacitive sensitivity were also calculated for the proposed sensors, capacitive sensitivity for the proposed sensors is 621.9241fF/g, 621.9241fF/g and 681.2889fF/g. The maximum displacement is observed for the sensors is 1.6um,0.3um and 0.2um with an eigenfrequency of 122KHz. Along with this natural frequency, analysed the quality factor for the proposed structures were observed as 4.06. Fabrication is done with the SOIMUMPS process and SEM characterization is accomplished for the proposed structures.