2021
DOI: 10.14445/22315381/ijett-v69i10p211
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Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer

Abstract: This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the accelerometer was tested for both static and dynamic conditions, and the corresponding static capacitance value was calculated and was found to be C0=0.730455pF, a response time of 95.17μs, and settling time of 7.261ms and the displacement sensitivity Sd= 3.5362* m/g. It was observ… Show more

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