2012
DOI: 10.1016/j.nima.2012.02.030
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Design modification in rotor blade of turbo molecular pump

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Cited by 17 publications
(3 citation statements)
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“…One of the parameters affecting the AMTEC efficiency is the thickness of BASE and electrodes, which we have investigated in this work by computer simulation. With the Nano scale modern technology available [11,12] one can examine experimentally the influence of the variation in thickness of BASE and electrodes at this scale.…”
Section: Working Principle Of Amtecmentioning
confidence: 99%
“…One of the parameters affecting the AMTEC efficiency is the thickness of BASE and electrodes, which we have investigated in this work by computer simulation. With the Nano scale modern technology available [11,12] one can examine experimentally the influence of the variation in thickness of BASE and electrodes at this scale.…”
Section: Working Principle Of Amtecmentioning
confidence: 99%
“…Researchers focus on the generalization and summarization of hydraulic models [9,10], profiles optimization of hydraulic components [11,12], and internal flow fields by CFD (Computational Fluid Dynamics) with respect to optimizing the pump flow path [13][14][15]. Liquid streamlines in pumps are in accordance with the blade profiles, under the constraint of the impeller and stay vane.…”
Section: Introductionmentioning
confidence: 99%
“…A turbo molecular pump (TMP) is currently one of the most widely used apparatus for obtaining high and ultrahigh vacuum. A number of investigations have been carried out on the pumping principle [1], key structures [2][3][4][5][6] and manufacturing technologies [7] of the pump. Among the studies on effective pumping speed of TMP, especially the pumping mechanism, at the turbine blades region, either with the 2D model [8][9][10] or 3D model [11][12][13][14][15], most of them are based on the hypothesis that the incident gas molecules (IGM) distribute uniformly at the turbine blades surface [8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%