In contrast to the room temperature cyclotron, the superconducting cyclotron’s high operational magnetic field and small extraction radius lead to a magnet design with a reduced radius. This limits the space available for the RF cavity in the 11 MeV superconducting cyclotron, necessitating a more compact RF cavity design. By using the transmission line theory, the complex structure of the quarter-wavelength coaxial cavity can be represented as a microwave circuit. Through relevant theoretical analytical formulas, equivalent circuit parameters can be derived. The resonant frequency of the RF cavity is then determined using the equivalent circuit method. The optimization of the RF cavity structure was achieved by creating a numerical model and conducting finite element numerical calculations on the high-frequency resonant system. The comparative results between the equivalent circuit and numerical calculations indicate that the frequency error remains within 0.1%, validating the compact RF cavity design. A multiple linear regression analysis facilitates the prediction of resonance frequency across various parameter variables. By analyzing the fitting formula, RF cavity machining error requirements are established, ensuring a prediction error within 1%, thus meeting engineering design criteria.