Design of a 3-axis thermal accelerometer using an electro-thermo-fluidic model

Rocha, Licinio; Silva, Cátia Samanta Ribeiro; Pontes, A. J.; Viana, J. C.

doi:10.1109/esime.2012.6191775

Cited by 4 publications

(6 citation statements)

References 8 publications

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“…The heater is shaped as a cross to assure homogeneous heating of the surrounding fluid. According to simulations performed [25,26], the distance between the heater and temperature sensors should be around 300 µm in order to maximize the sensitivity of the device. The heater and temperature sensors' area should be as small as possible in order to increase the electrical resistance value which reduces the power consumption and increases sensitivity.…”

Section: Conceptual Designmentioning

confidence: 99%

“…The introduction of current into the heater causes the temperature to increase (up to 300 °C) to assure proper functionality. Temperatures at the external supportive structures can reach a maximum of 50 °C according to simulations performed [25,26]. The external structure should also protect the sensor from oscillations in the ambient temperature and should therefore have a low thermal conductivity.…”

Section: Materials Selectionmentioning

confidence: 99%

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Fabrication and characterization of polymeric three-axis thermal accelerometers

Silva

Noh

Fonseca

et al. 2015

J. Micromech. Microeng.

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The concept, fabrication process, and characterization of a three-axis thermal accelerometer are presented in this paper. A combination of microelectromechanical systems (MEMS) technology with microinjection molding enables the realization of functional, highly complex 3D geometries at the microscale, used here for the fabrication of a fully integrated three-axis accelerometer. While conventional thermal accelerometers are silicon based, using MEMS technologies only, the integration of polymeric materials and technologies into the fabrication process can greatly improve the realization of three-axis devices while diminishing the typical thermal losses. Three-axis thermal accelerometers were successfully fabricated by combining the proposed technologies proving the viability of the concept. Fabricated accelerometers show xy-axis sensitivity around 8 mV g−1, a z-axis sensitivity of 2.2 mV g−1 for a power of 45 mW and a 4 Hz bandwidth (bandwidth is based on simulations). Thermal tests performed showed that the heater can sustain up to 280 °C without overheating the remaining structures and damaging the device.

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Section: Conceptual Designmentioning

confidence: 99%

Section: Materials Selectionmentioning

confidence: 99%

Fabrication and characterization of polymeric three-axis thermal accelerometers

Silva

Noh

Fonseca

et al. 2015

J. Micromech. Microeng.

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“…A straightforward and simple method is to place the heater and temperature sensors on a vertical or inclined plane [5]. The second method is shown in Figure 2a; the heater and two temperature sensors are placed on three layers the same distance apart [6]. When neither acceleration nor gravity is applied to the accelerometer, a spherical heat bubble is created (i.e., the gray-filled circle), and the two sensors show the same temperature.…”

Section: Introductionmentioning

confidence: 99%

Computational Experiments on the Step and Frequency Responses of a Three-Axis Thermal Accelerometer

Ogami¹,

Murakita²,

Fukudome³

2020

Prime Archives in Sensors

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The sensor response has been reported to become highly nonlinear when the acceleration added to a thermal accelerator is very large, so the same response can be observed for two accelerations with different magnitudes and opposite signs. Some papers have reported the frequency response for the horizontal acceleration to be a first-order system, while others have reported it to be a second-order system. The response for the vertical acceleration has not been studied. In this study, computational experiments were performed to examine the step and frequency responses of a three-axis thermal accelerometer. The results showed that monitoring the temperatures at two positions and making use of cross-axis sensitivity allow a unique acceleration to be determined even when the range of the vertical acceleration is very large (e.g., −10,000-10,000 g). The frequency response was proven to be a second-order system for horizontal acceleration and a third-order system for vertical acceleration.

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“…This device allows obtaining the Z sensitivity of 25 µV/g. In the works published by Rocha and Silva [38][39][40][41], a polymeric three-axis device was fabricated by conventional micromachining and injection molding. The heating and the temperature sensing structures, made of aluminum, were patterned on a flexible polymeric membrane.…”

Section: Introductionmentioning

confidence: 99%

Tri-axis convective accelerometer with closed-loop heat source

Dau

Dinh

Tran

et al. 2018

Sensors and Actuators A: Physical

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In this paper, we report the details and findings of a study on tri-axis convective accelerometer, which is designed with the closed-loop type heat source and thermal sensing hotwire elements. The closed-loop heat source enhances the convective flow to the central part where a hotwire is placed to measure the vertical component of acceleration. The simulation was conducted using numerical analysis, and the device was prototyped by additive manufacturing. The device, functioning as a tilt sensor and an accelerometer, was tested up to acceleration of 20g.The experiments were successfully conducted and the experimental results agreed reasonably with those obtained by numerical analysis. The results demonstrated that the closed-loop heat source could reduce the cross effect between the acceleration components. The scale factor and cross-sensitivity had the values of 0.26 μV/g and 1.2%, respectively. The cross-sensitivity and the effects of heating power were also investigated in this study.

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Design of a 3-axis thermal accelerometer using an electro-thermo-fluidic model

Cited by 4 publications

References 8 publications

Fabrication and characterization of polymeric three-axis thermal accelerometers

Fabrication and characterization of polymeric three-axis thermal accelerometers

Computational Experiments on the Step and Frequency Responses of a Three-Axis Thermal Accelerometer

Tri-axis convective accelerometer with closed-loop heat source

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