Design of a flexure-based constant-force XY precision positioning stage

Wang, Piyu; Xu, Qingsong

doi:10.1016/j.mechmachtheory.2016.10.007

Cited by 153 publications

(31 citation statements)

References 24 publications

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“…Hence, both static and dynamic performances highlight the importance and necessity of a larger actuating force. More recently, constant-force or statically-balanced compliant mechanisms have been investigated [134,135]. This emerges as a promising research topic of actuation technology for various manipulation tasks [136].…”

Section: Further Discussionmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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Section: Further Discussionmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

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“…Zhang and Chen et al [258] established a complete elliptic integral solution for flexure beams with any number of inflection points. More recently, kinetostatics of an XY micro positioning stage with the negative stiffness mechanism was analyzed by Wang and coworkers [44,259] based on the elliptic integral solutions. From the previous advances, elliptic integral solutions were mainly limited to single beams.…”

Section: Elliptic Integral Solutionsmentioning

confidence: 99%

“…Research described in Refs. [44] and [259] are examples for application in compliant mechanisms. In addition, elliptic integral solutions were frequently applied to optimize the characteristic parameters in the pseudo-rigid-body model due to its high accuracy [58,59,101,102,214].…”

Section: Elliptic Integral Solutionsmentioning

confidence: 99%

“…1). Partially compliant mechanisms often bear large deflection widely applied in areas such as statically balanced mechanisms [38][39][40][41], constant-force mechanisms [42][43][44], and joint of robots [45]. Fully compliant mechanisms are usually manufactured in monolithic structures, which are widely applied in precision engineering with static and dynamic applications.…”

Section: Introductionmentioning

confidence: 99%

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Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

163

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Flexure-based compliant mechanisms are becoming increasingly promising in precision engineering, robotics, and other applications due to the excellent advantages of no friction, no backlash, no wear, and minimal requirement of assembly. Because compliant mechanisms have inherent coupling of kinematic-mechanical behaviors with large deflections and/or complex serial-parallel configurations, the kinetostatic and dynamic analyses are challenging in comparison to their rigid-body counterparts. To address these challenges, a variety of techniques have been reported in a growing stream of publications. This paper surveys and compares the conceptual ideas, key advances, and applicable scopes, and open problems of the state-of-the-art kinetostatic and dynamic modeling methods for compliant mechanisms in terms of small and large deflections. Future challenges are discussed and new opportunities for extended study are highlighted as well. The presented review provides a guide on how to select suitable modeling approaches for those engaged in the field of compliant mechanisms.

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“…Kinetic Structure. A lot of compliant micropositioning stages from one degree of freedom (DOF) [14], 2 DOFs [15], and 3 DOFs [16] were illustrated in Figures 1(a)-1(c), respectively. However, a compliant rotary positioning stage (CRPS) for indentation device has been less researched.…”

Section: Design Of Compliant Rotary Positioning Stagementioning

confidence: 99%

Effective Hybrid Algorithm of Taguchi Method, FEM, RSM, and Teaching Learning‐Based Optimization for Multiobjective Optimization Design of a Compliant Rotary Positioning Stage for Nanoindentation Tester

Dang

Dao

Chau

et al. 2019

Mathematical Problems in Engineering

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This paper proposes an effective hybrid optimization algorithm for multiobjective optimization design of a compliant rotary positioning stage for indentation tester. The stage is created with respect to the Beetle’s profile. To meet practical demands of the stage, the geometric parameters are optimized so as to find the best performances. In the present work, the Taguchi method is employed to lay out the number of numerical experiments. Subsequently, the finite element method is built to retrieve the numerical data. The mathematical models are then established based on the response surface method. Before conducting the optimization implementation, the weight factor of each response is calculated exactly. Based on the well-established models, the multiple performances are simultaneously optimized utilizing the teaching learning-based optimization. The results found that the weight factors of safety factor and displacement are 0.5995 (59.95%) and 0.4005 (40.05%), respectively. The results revealed that the optimal safety factor is about 1.558 and the optimal displacement is 2.096 mm. The validations are in good agreement with the predicted results. Sensitivity analysis is carried out to identify the effects of variables on the responses. Using the Wilcoxon’s rank signed test and Friedman test, the effectiveness of the proposed hybrid approach is better than that of other evolutionary algorithms. It ensures a good effectiveness to solve a complex multiobjective optimization problem.

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Design of a flexure-based constant-force XY precision positioning stage

Cited by 153 publications

References 24 publications

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Effective Hybrid Algorithm of Taguchi Method, FEM, RSM, and Teaching Learning‐Based Optimization for Multiobjective Optimization Design of a Compliant Rotary Positioning Stage for Nanoindentation Tester

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