Design of a high-adhesion-strength and high-toughness Ta/Ta(N) multilayer coating and exploration of the influence exerted by Ta(N) layer thickness

Ding, Xiaoyun; Cui, Menghui; Lian, Yong; Jiao, Jinchao; Yang, Jinghan; Wu, Yawen; Cheng, Yingchun; Zhang, Jin; Tian, Xiubo; Gong, Chunzhi

doi:10.1016/j.vacuum.2024.113929

Vacuum

2025

DOI: 10.1016/j.vacuum.2024.113929

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Design of a high-adhesion-strength and high-toughness Ta/Ta(N) multilayer coating and exploration of the influence exerted by Ta(N) layer thickness

Xiaoyun Ding,

Menghui Cui,

Yong Lian

et al.

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Design of a high-adhesion-strength and high-toughness Ta/Ta(N) multilayer coating and exploration of the influence exerted by Ta(N) layer thickness

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References 55 publications

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