2009 Ph.D. Research in Microelectronics and Electronics 2009
DOI: 10.1109/rme.2009.5201315
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Design of a high voltage fully differential driver for a double axis scanning micromirror

Abstract: The design of a high voltage fully differential driver in a 0.18 μm Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror's higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations pe… Show more

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Cited by 3 publications
(5 citation statements)
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“…The DAC is used in an integrated laser projection system [17] that can be used in high volume applications such as automotive head-up display, display projection of handheld devices (mobile phones, PDA) and projection of virtual keyboards. The converter is used to drive a high voltage fully-differential amplifier [18]. This amplifier actuates a MEMS micromirror, by means of an electrostatic comb-drive, as shown in Fig.…”
Section: Segmented Architecturesmentioning
confidence: 99%
“…The DAC is used in an integrated laser projection system [17] that can be used in high volume applications such as automotive head-up display, display projection of handheld devices (mobile phones, PDA) and projection of virtual keyboards. The converter is used to drive a high voltage fully-differential amplifier [18]. This amplifier actuates a MEMS micromirror, by means of an electrostatic comb-drive, as shown in Fig.…”
Section: Segmented Architecturesmentioning
confidence: 99%
“…Finally, it is worth noting that differently from other biasing options considered in [13] (such as using a nonnull constant low-voltage value ζ, different from Vb, to supply the moveable fingers) the scheme in Figure 2 simplifies the actuation electronics.…”
Section: Digital-input Actuation Schemementioning
confidence: 99%
“…The proposed innovative driving principle is implemented by a driving interface, fully integrated in BCD technology, whose architecture is sketched in Figure 2. It is composed by the analog-input HV fully differential driver we presented in [13] together with the DAC whose design is detailed in Sections 3 and 4. Particularly from the MOEMS transducer driving specification two equal 10-bit DACs have to be used to generate the V 1 and V 2 stimulating waves that are separately buffered and amplified to the required voltage range by the HV driver.…”
Section: Digital-input Actuation Schemementioning
confidence: 99%
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“…As compared with the BJT technology, the CMOS process can be achieved a high complexity at same area by using pMOS and nMOS devices to accomplish a driver chip [1][2][3][4][5][6][7][8]. The TSMC 0.6um CMOS process has been used to develop a high-current driving chip in this work, and the supply voltage is a 5V bias, meanwhile, this circuit will have an 8 ohm loading.…”
Section: Introductionmentioning
confidence: 99%