Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor

Huang, Tingting; Yang, Jie; Ma, Tao

doi:10.1117/12.2604571

10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Met 2021

DOI: 10.1117/12.2604571

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Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor

Tingting Huang¹,

Jie Yang²,

Tao Ma³

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2024

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Cited by 2 publications

References 10 publications

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Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

Liao,

Yang,

et al. 2024

Photonic Sens

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This article proposes a line scanning chromatic confocal sensor to solve the problem of limited chromatic confocal measurement due to the small measurement range and low measurement efficiency in the industrial inspection process. To obtain an extensive dispersion range, the advantages of a simple single-axis structure are combined with the advantages of a large luminous flux of a biaxial structure. Considering large-scale measurement, our sensor uses off-axis rays to limit the illumination path and imaging path to the same optical path structure. At the same time, the field of view is expanded, and a symmetrical structure is adopted to provide a compact optical path and improve space utilization. The simulation and physical system test results shows that the sensor scanning line length is 12.5 mm, and the axial measurement range in the 450 nm to 750 nm band is better than 20 mm. The axial resolution of the detector is ±1 µm combined with the subpixel centroid extraction data processing method, and the maximum allowable tilt angle for specular reflection samples is ±7°. The thicknesses of transparent standard flat glass and the wet collagen membrane are measured. The maximum average error is 1.3 µm, and the relative error is within 0.7%. The constructed sensor is of great significance for rapidly measuring the three-dimensional profile, flatness, and thickness in the fields of transparent biological samples, optics, micromechanics, and semiconductors.

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Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

Liao,

Yang,

et al. 2024

Photonic Sens

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High-Precision Chromatic Confocal Technologies: A Review

Li,

Ma,

Bai

2024

Micromachines

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Chromatic confocal technology is widely used for precise, steady, and efficient displacement measurement in many industrial fields. It employs the confocal and dispersion principles to encode axial positions with the wavelengths of the reflected broad spectrum. The typical chromatic confocal sensor includes a light source, a dispersion objective, conjugate pinholes, and a spectral detection device. This study offers an overview of the current research on chromatic confocal technology. Because of its good performance in displacement detection, chromatic confocal technology has been widely used in contour measurement, biomedical imaging, and thickness measurements, as part of global and professional research. Due to its structural flexibility, it is also easily integrated into industrial equipment for in-machine and online profile measurements. It holds significant potential for future applications in industrial manufacturing and scientific research. However, there are also some challenges to be explored in terms of the broadband light source, dispersive optics design, and the balance between speed and accuracy in signal processing.

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Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor

Cited by 2 publications

References 10 publications

Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

High-Precision Chromatic Confocal Technologies: A Review

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