2023
DOI: 10.3390/act12020077
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Design of a Single-Sided, Coreless, Flat-Type Linear Voice Coil Motor

Abstract: A voice coil motor is a type of permanent magnet linear motor, which is based on the Ampere force theorem. It has the following advantages: a simple structure, a small size, no cogging force, and a fast response time. In this study, a voice coil motor was designed to provide x-directional thrust in the magnetically levitated cable table of a lithography machine. The voice coil motor designed in this study was based on the Halbach permanent magnet array, and adopted a single-sided, coreless, flat-type structure… Show more

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Cited by 3 publications
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“…The simple structure of DLSM offers high flexibility to the machine in terms of size and space, with the few components needed in the motor and limited lubrication making installation and maintenance easy. Due to linear machines' advantages in delivering precise linear motion and accurate positioning, they have found widespread use in various industries for applications requiring the precise control of linear motion [5]. DC linear stepper motors are frequently employed in industrial automation systems, such as pick-and-place machines, material handling equipment, and robotic systems.…”
Section: Introductionmentioning
confidence: 99%
“…The simple structure of DLSM offers high flexibility to the machine in terms of size and space, with the few components needed in the motor and limited lubrication making installation and maintenance easy. Due to linear machines' advantages in delivering precise linear motion and accurate positioning, they have found widespread use in various industries for applications requiring the precise control of linear motion [5]. DC linear stepper motors are frequently employed in industrial automation systems, such as pick-and-place machines, material handling equipment, and robotic systems.…”
Section: Introductionmentioning
confidence: 99%