Design of air Atmospheric Pressure Diffuse Coplanar Barrier Discharge apparatus

Abstract

Abstract. In this study, we explored a coplanar barrier discharge apparatus for material modification. The apparatus is introduced and several ways are proposed for fabricating the apparatus. The parameters are optimized and proposed experimentally. The results show the electrode distance and the dielectric layer thickness are very important for the discharge performance. When the electrode distance is 0.5 mm, the dielectric layer thickness is 25m, the coplanar barrier discharge plasma appears on the device in air at 760 torr.