2018
DOI: 10.1080/10739149.2018.1540430
|View full text |Cite
|
Sign up to set email alerts
|

Design of an automated particle detection system for Rutherford backscattering (RBS) using LabVIEW

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2020
2020
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 14 publications
0
2
0
Order By: Relevance
“…Oh and Christenson [44] have developed a particle detection system for Rutherford backscattering (RBS). RBS has commonly been applied in the electronics industry for material analysis, especially for inspection in semiconductors, superconductors, thin surface structures, metal and crystal orientations, metal and crystal damage, and polymers.…”
Section: B Power Electrical and Electronicsmentioning
confidence: 99%
“…Oh and Christenson [44] have developed a particle detection system for Rutherford backscattering (RBS). RBS has commonly been applied in the electronics industry for material analysis, especially for inspection in semiconductors, superconductors, thin surface structures, metal and crystal orientations, metal and crystal damage, and polymers.…”
Section: B Power Electrical and Electronicsmentioning
confidence: 99%
“…With the virtual instrument automation, we are able to reduce the experimental duration and get the RBS spectra, resulting in an increased experimental throughput of the accelerator. The automation had added advantages over other similar works [21,22] in versatility, availability of Hi-RBS automation and its detailed description, multiple sample ion implantation, easy reconfiguration and amenability to add other ion beam analysis experiments. The full automation software consists of standalone executable virtual instruments which provide user interactive graphical interfaces.…”
Section: Development Of Virtual Instruments For Automated Ion Implant...mentioning
confidence: 99%