Design of an on-chip microscale nanoassembly system

Gorman, Jason J.; Kim, Yong Sik; Vladár, András; Dagalakis, Nicholas G.

doi:10.1504/ijnm.2007.017990

Cited by 10 publications

(10 citation statements)

References 12 publications

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“…With limited space in the Y stage, it is difficult to increase the number of beams to more than 15 and higher than 1:10 lever ratio. Thus 15 beams and 1:10 lever ratio were selected in the stage design and, as a result, a displacement of 115 μm is possible at the platform based on equation (7). But this is limited by other design constraints such as thermal and structural issues.…”

Section: The Lever Ratio and The Number Of Beamsmentioning

confidence: 99%

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Design, fabrication and testing of a serial kinematic MEMSXYstage for multifinger manipulation

Kim

Yoo

Yang

et al. 2012

J. Micromech. Microeng.

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In micro-electro-mechanical systems (MEMS) it is difficult to obtain a large range of motion with a small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a MEMS-based XY stage is reported for multifinger manipulation application. The SKM MEMS XY stage is implemented by embedding a single degree-of-freedom (DOF) stage into another single DOF stage. The proposed MEMS XY stage is fabricated by deep reactive ion etching (DRIE) from both sides of a silicon-on-insulator (SOI) wafer. This SKM MEMS stage has the capability to generate more than 50 μm displacements along each X-and Y-axes. This nested structure also suppressed the coupled motion error to 0.6% of the original actuation displacement. For the demonstration on the micro-particle manipulation, a 15 μm sized polypropylene particle is manipulated and rotated by operating two individual fingers attached to proposed MEMS stages.

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Section: The Lever Ratio and The Number Of Beamsmentioning

confidence: 99%

“…applications [2]. Hence, MEMS-positioning stages have been widely used in many applications such as optical systems [3,4], atomic force microscopes (AFMs) [5] and nanomanufacturing assembly [6,7].…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication and testing of a serial kinematic MEMSXYstage for multifinger manipulation

Kim

Yoo

Yang

et al. 2012

J. Micromech. Microeng.

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“…Figure 7(c) shows the measured average capacitance. The fitted second order curve shows the nonlinearity of the sensor response of 2 aF/(µm) 2 . The second order fit was chosen as a simple relationship between the measured capacitance and the gap between the sensor and the moving object.…”

Section: Sensor With Five Electrodesmentioning

confidence: 95%

“…Common nano applications involve objects that cannot tolerate additional weight from electrical connections and/or are made from materials that cannot be electrically charged. 1,2 These limitations lead to the design of a very simple sensor that has a small footprint.…”

Section: Introductionmentioning

confidence: 99%

Capacitive displacement sensor for detecting planar submicrometer motion

Avramov-Zamurovic

Yoo

Dagalakis

2016

Review of Scientific Instruments

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This paper describes the design of a very simple displacement sensor that measures the change in the position of an object by sensing the change in capacitance due to the movement of this object in the sensor fringing electric field. Two sensor geometries with small footprints were considered and several sensor variations were built and tested. At distances of approximately 0.5 μm and 30 μm, test results demonstrated that the sensors' resolution was in the order of tens of nanometers.

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“…Strong efforts have been put into the design of new micromanipulation devices [1][2][3]. The manipulation of objects at the microscale (generally from 1 mm to 1 mm) is, however, often disturbed by perturbations related to adhesive surface forces [4].…”

Section: Introductionmentioning

confidence: 99%