Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm

Chao, 张超 Zhang; Jierui, 张杰瑞 Zhang; Yiming, 王一名 Wang; Shangqi, 匡尚奇 Kuang; Yao, 谢耀 Xie

doi:10.3788/aos201737.0631001

光学学报

2017

DOI: 10.3788/aos201737.0631001

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Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm

张超 Zhang Chao¹,

张杰瑞 Zhang Jierui²,

王一名 Wang Yiming³

et al.

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Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm

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