Good response, in particular high sensitivity, of polyvinylidene fluoride (PVDF) attracts a lot of research works on its manufacturing process and applications. Polarization is an important factor that is influential to the performance of PVDF. In this article, a new polarization method using ITO (Indium Tin Oxide) glass is proposed. Different from the conventional poling method using metal eletrode coated onto PVDF film, ITO glass is used as electrode to transmit the electric field voltage into PVDF film for poling. With the advantage of applying higher electric field in the process of polarization and eliminating the occurrence of flashover and arcing efficiently, this approach can thus make PVDF film gain better electric output response. Also, thinner film is constructed would be another advantage of sensitivity improvement. Comparison with conventional method for regular polarization area is carried out by using both FTIR and DSC equipment. Piezoelectric charge constant d 33 and electricity output response as well as sensitivity of PVDF are measured in experiment, which indicate ITO glass poling method is superior to conventional technique.