Design of Disc-Shaped Tool in Electrochemical Removal of Displays' Color Filter Reclaim Process

Abstract

A new design system using a disc-shaped cathode as a tool electrode and electrochemical removal as a precision reclaiming process of ITO thin-film removal from optoelectronic flat panel displays' color filter surface is presented. The electrochemical machining just needs quite a short time to remove the ITO film easily and cleanly. In the current experiment, a large major axis of the disc-shaped cathode or a small minor axis of the disc-shaped cathode corresponds to a higher removal rate for the ITO thin-film. A large flow rate of the electrolyte, a higher temperature, a high rotational speed of the electrodes, or a higher concentration of the electrolyte corresponds to a higher removal rate for ITO thin-film. Pulsed direct current can improve the effect of dreg discharge and is advantageous to be associated with the fast feed rate of the workpiece, but this raises the current rating. A higher feed rate of displays' color filter combined with enough electric power produces fast electrochemical removal. Through the ultra-precise removal of thin film microstructure, the semiconductor optoelectronic industry can effectively recycle defective products, reducing production costs.