Design of efficient broadband extreme ultraviolet multilayer mirrors using a two-parametric merit function

Lin, Zhining; Bai, Guangfu; Chen, Shujing; Lin, Chengyou

doi:10.1016/j.optcom.2021.127018

Cited by 2 publications

(2 citation statements)

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“…A two-parametric merit function consisting of the mean value and the mean square deviation of the reflectivity has been proposed recently and exhibits good performance for the design of EUV broadband multilayer mirrors [29]. In this paper, we employ this two-parametric MF, as shown in equation ( 5), for designing the parameters of the proposed SM for broadband reflection in the water window region.…”

Section: Genetic Algorithmmentioning

confidence: 99%

“…For enhancing the optimization efficiency of the Cr/Sc SM, we used a genetic algorithm (GA) [27,28] to optimize the bilayer number, bilayer thickness, and thickness ratio for each PM. To obtain maximum uniform reflection in the desired spectral band, a two-parametric merit function consisting of the mean value and the mean square deviation of reflectivity [29] is employed in GA. Using this method, broadband reflection mirrors in the water window are designed by Cr/Sc SMs, and compared with the ones designed by Cr/Sc AMs.…”

Section: Introductionmentioning

confidence: 99%

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Design of a broadband reflection mirror for the water window region using a stacked multilayer with optimized structure

Yang¹,

Chen²,

Lin³

2022

J. Opt.

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A broadband reflection mirror that can realize maximum uniform reflectivity is an important optical element in the water window region. In this paper, a stacked multilayer mirror with optimized structure for achieving broadband reflection in the water window region is presented. A genetic algorithm with a two-parametric merit function is employed to achieve maximum uniform reflection in the desired spectral band. 4.90% average reflectivity with 0.25% root-mean-square deviation in the range of 370-390 eV is achieved by a Cr/Sc stacked multilayer with 40 periodic multilayer structures. Compared with aperiodic multilayers, proposed stacked multilayers exhibit better optimization efficiency, design robustness, and thickness error tolerance. This research provides an efficient method for designing broadband reflection mirrors in the water window region, and may be helpful for steering broadband water window sources, such as high order harmonics and attosecond pulse.

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Section: Genetic Algorithmmentioning

confidence: 99%