Design of folded monopole array antenna used for large area plasma production

Microcrystalline Silicon Solar Cells Fabricated using Array-Antenna-Type Very High Frequency Plasma-Enhanced Chemical Vapor Deposition System

“…This phase control method was developed for the uniform deposition of a-Si:H and has been explained in comparison to the electromagnetic field strength around the electrodes calculated by the finite difference time domain (FDTD) method. 11,14) For uniform gas distribution in the direction along the electrode, the size and numbers of the openings for the gas outlet on the electrode surface were optimized. By introducing a mixture of source gases from all electrodes and high-frequency power with the phase control method, homogeneous film thickness and crystallinity in the direction along the electrode was achieved as shown in Fig.…”