Design of generalized SPUDT filters

Ruppel, C.C.W.; Dill, R.; Franz, Judy R.; Kurp, S.; Ruile, W.

doi:10.1109/ultsym.1996.583951

Cited by 18 publications

(5 citation statements)

References 12 publications

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“…Next, the obtained performance is compared with reported SAW SPUDT ADLs [22], [27], [29], [58], [61]- [64]. First, our device features better frequency scalability [Fig.…”

Section: Discussionmentioning

confidence: 99%

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems

Link

Gong

2020

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of 3 µm show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms. Index Terms-Acoustic delay lines (ADLs), aluminum nitride (AlN), lamb mode, piezoelectric transducers, radio frequency (RF) microsystems, unidirectional transducers. I. INTRODUCTIONA LUMINUM nitride (AlN)-based radio frequency (RF) microsystems have been widely adopted in the past decade for various applications, including RF acoustic signal processing [1]-[6], physical sensing [7], [8], optomechanical interaction [9]-[14], and quantum acoustics [15]. Fundamentally, their ubiquity owns to the desirable piezoelectric, mechanical, and optical properties of AlN [16], [17], which in combination provides a cross-cutting platform that allows the selection and combination of technical advantages from the electrical, optical, and acoustic domains. Often, effective electromechanical transduction is paramount in these systems as it holds the key for coupling signal and power between domains and consequently harnessing underlying benefits from each domain (e.g., low loss and small size for acoustics).One challenge in attaining efficient transduction is to launch acoustic waves or phonons unidirectionally for devices involving waveguiding or acoustointeraction with optical or

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“…Next, the obtained performance is compared with reported SAW SPUDT ADLs [22], [27], [29], [58], [61]- [64]. First, our device features better frequency scalability [Fig.…”

Section: Discussionmentioning

confidence: 99%

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems

Link

Gong

2020

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…The input inter-digital transducer (IDT) of the sensor was configured as a single-phase-unidirectional transducer (SPUDT) so that most of the SAW power would be directed to the delay line. 10) For reduction of the undesirable reflection of the SAW at the edges of the LiTaO 3 substrate, a polymeric epoxy layer was attached to the bottom and side edges of the substrate. The delay line for the sensing channel was coated by thermal evaporation with a thin gold film on which a probe DNA layer was to be immobilized in order to detect the target DNA.…”

Section: Sensor Fabricationmentioning

confidence: 99%

Surface Acoustic Wave DNA Sensor with Micro-Fluidic Channels

Sakong¹,

Roh²,

Roh³

2007

jjap

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We developed a surface acoustic wave (SAW) sensor system for detection of the immobilization and hybridization of DNA molecules. The sensor consists of twin SAW delay line oscillators (sensing channel and reference channel) fabricated on 36° rotated Y-cut X-propagation LiTaO3 piezoelectric single crystals. Center frequency of the SAW oscillators is 200 MHz. The relative change in the frequency of the two oscillators was monitored to detect the immobilization of a probe DNA with thiol group on an Au coated delay line and the hybridization between a target DNA and the probe DNA. The target solution was continuously flowing over the probe DNA layer via micro-fluidic channels made of polyimide tubes. The sensitivity of the sensor was as high as 136 pg/(ml·Hz). In addition to the inherent advantage of being label-free, the SAW DNA sensor in this paper has promising practical applicability in terms of the sensitivity.

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“…Each delay line of the sensor was configured as an oscillator. The input inter-digital transducer (IDT) of the sensor was configured as a single-phase-unidirectional-transducer (SPUDT) so that most of the SAW power would be directed to the delay line [10]. For the reduction of the undesirable reflection of the SAW at the edges of the LiTaO 3 substrate, a polymeric epoxy layer was attached to the bottom and side edges of the substrate.…”

Section: Sensor Fabricationmentioning

confidence: 99%

Development of an SH-SAW sensor for detection of DNA immobilization and hybridization

et al. 2005

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We have developed SH (shear horizontal) surface acoustic wave (SAW) sensors for detection of the immobilization and hybrdization of DNA (deoxyribonucleic acid) on the gold coated delay line of transverse SAW devices. The experiments of DNA immobilization and hybridization were performed with 15-mer oligonucleotides (probe and complementary target DNA). The sensor consists of twin SAW delay line oscillators (sensing channel and reference channel) operating at 100 MHz fabricated on 36˚ rotated Y-cut X-propagation LiTaO 3 piezoelectric single crystals. The relative change in the frequency of the two oscillators was monitored to detect the immobilization of probe DNA with thiol group on the Au coated delay line and the hybridization between target DNA and immobilized probe DNA in a pH 7.4 PBS (phosphate buffered saline) solution. The measurement results showed a good response of the sensor to the mass loading effects of the DNA immobilization and hybridization with the sensitivity up to 1.5 ng/ml/Hz.

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Design of generalized SPUDT filters

Cited by 18 publications

References 12 publications

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems

Surface Acoustic Wave DNA Sensor with Micro-Fluidic Channels

Development of an SH-SAW sensor for detection of DNA immobilization and hybridization

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